Method and device for tightness testing

Abstract

A method for tightness testing, wherein an evacuated test object is exposed to the external influence of a test gas and wherein a gas mixture made of a test gas withdrawn from the test object and of a carrier gas, is examined for the presence of test gas by use of a test gas sensor which, when viewed in the flow direction of the gas mixture, is arranged downstream of a condensing pump for analyzing the compressed gas mixture, wherein the test object is exposed to the ambient atmosphere without being surrounded by a test chamber, and that a test gas gun is provided for generating the atmosphere containing the test gas.

What is claimed is: 
     
         1 . A method for tightness testing, wherein an evacuated test object is exposed to the external influence of a test gas and wherein a gas mixture made of a test gas withdrawn from the test object and of a carrier gas, is examined for the presence of test gas by use of a test gas sensor which, when viewed in the flow direction of the gas mixture, is arranged downstream of a condensing pump for analyzing the compressed gas mixture, wherein the test object is exposed to the ambient atmosphere without being surrounded by a test chamber, and that a test gas gun is provided for generating the atmosphere containing the test gas. 
     
     
         2 . The method according to  claim 1 , wherein the carrier gas is supplied to the flow of test gas behind the test object. 
     
     
         3 . A device for tightness testing of a test object, comprising a means for generating, outside an evacuated test object, an atmosphere containing a test gas, further comprising a condenser pump being connectible to the test object directly or in series with another component, and a test gas sensor connected to the condenser outlet of the pump, wherein the test object is exposed to the ambient atmosphere without being surrounded by a test chamber, and that a test gas gun is provided for generating the atmosphere containing the test gas. 
     
     
         4 . A device for tightness testing, comprising a pump arrangement for pumping gas from a test chamber containing a test object or from a test object, and a test gas sensor connected to said pump arrangement, wherein the pump arrangement generates a high pressure situated above the atmospheric pressure, and that the test gas sensor is connected to said high pressure.