US2014116329A1PendingUtilityA1
Methods of growing heteroepitaxial single crystal or large grained semiconductor films and devices thereon
Est. expiryMay 28, 2028(~1.9 yrs left)· nominal 20-yr term from priority
Inventors:Praveen Chaudhari
H10P 14/3462H10P 14/3458H10P 14/3456H10P 14/3431H10P 14/3428H10P 14/3421H10P 14/3411H10P 14/3238H10P 14/3202H10P 14/2923H10P 14/2922H10P 14/279H10P 14/274H10P 14/263H10P 14/26H10P 14/24H10F 77/707H10F 77/703H10F 77/30H10F 71/00H10F 19/20H10F 10/161H10F 10/142H10F 71/121Y02P70/50C30B 23/025C30B 25/183Y02E10/544Y02E10/547C30B 11/12C30B 25/02C30B 29/06
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Claims
Abstract
A method is disclosed for making sapphire glass, consisting of a layer of sapphire on glass. The sapphire layer, or crystalline Al 2 O 3 , is deposited on ordinary (soda-lime) glass via a textured MgO template.
Claims
exact text as granted — not AI-modified1 . A method of producing sapphire on glass, comprising:
depositing an MgO film on glass; and depositing Al 2 O 3 on said MgO film.
2 . The method of claim 1 , wherein said MgO film is crystalline.
3 . The method of claim 1 , wherein said Al 2 O 3 film is crystalline sapphire.
4 . The method of claim 1 , wherein said MgO film is deposited below about 600° C.
5 . The method of claim 1 , wherein the Al 2 O 3 film is single crystalline sapphire.
6 . The method of claim 1 , wherein said Al 2 O 3 is deposited below about 600° C.
7 . The method of claim 1 , wherein said glass is soda-lime.
8 . The method of claim 1 , wherein said glass is borosilicate.
9 . A method of depositing single crystalline semiconductors on sapphire glass below the softening temperature of ordinary glass.
10 . The method of claim 8 , wherein the semiconductor comprises Si, Ge, Ga, or GaAs.
11 . The method of claim 8 , wherein said sapphire glass is a single crystalline sapphire substrate.
12 . The method of claim 8 , wherein said semiconductors are large grained.
13 . The method of claim 8 where said sapphire glass is crystalline Al 2 O 3 not single crystalline.Cited by (0)
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