Monolithic interferometric atomic force microscopy device

Abstract

A fiber-facet AFM probe enabling high-resolution, high sensitivity measurement of a sample surface is presented. AFM probes in accordance with the present invention include an optically resonant cavity that is defined by two mirrors, at least one of which is a photonic-crystal mirror. One of the mirrors is movable and is mechanically coupled with an AFM tip such that a force imparted on the tip by an interaction with the sample surface induces a change in the cavity length of the optically resonant cavity and, therefore, its reflectivity.

The following claims are presented for examination: 
     
         1 . An atomic-force microscope probe comprising:
 a first mirror that is partially transmissive for a first light signal having a first wavelength;   a second mirror that is partially transmissive for the first light signal, wherein the second mirror is movable, and wherein the first mirror and the second mirror collectively define an optically resonant cavity; and   a tip that is mechanically coupled with the second mirror;   wherein at least one of the first mirror and second mirror includes a first arrangement of features that collectively define a first photonic crystal that is operative for partially reflecting the first light signal.   
     
     
         2 . The probe of  claim 1  further comprising an optical fiber having a first facet, wherein the first facet is the first mirror. 
     
     
         3 . The probe of  claim 1  further comprising an optical fiber having a first facet, wherein one of the first mirror and second mirror is mechanically coupled with the first facet. 
     
     
         4 . The probe of  claim 3  further comprising a first actuator that is operative for imparting a first motion on the first facet. 
     
     
         5 . The probe of  claim 4  further comprising a second actuator that is operative for imparting a second motion on the first facet, wherein the first motion is directed along a first direction and the second motion is directed along a second direction that is substantially orthogonal with the first direction. 
     
     
         6 . The probe of  claim 1 , wherein the first mirror comprises the first arrangement of features, and wherein the second mirror comprises a second arrangement of features that collectively define a second photonic crystal that is operative for partially reflecting the first light signal. 
     
     
         7 . The probe of  claim 1  further comprising at least one tether that is mechanically coupled with the second mirror, the at least one tether being dimensioned and arranged to enable motion of the second mirror in a direction that is substantially orthogonal with a first plane, wherein the second mirror defines the first plane. 
     
     
         8 . The probe of  claim 1  further comprising a plurality of tethers that are mechanically coupled the second mirror, the plurality of tethers being dimensioned and arranged to enable motion of the second mirror in a direction that is substantially orthogonal with a first plane and inhibit motion of the second mirror in a direction substantially parallel with the first plane, wherein the second mirror defines the first plane. 
     
     
         9 . An atomic-force microscope probe comprising:
 an optical fiber having a first facet;   an optically resonant cavity comprising a first mirror that is movable with a first motion, the first mirror including a first photonic crystal that is partially transmissive for a first light signal, wherein the optically resonant cavity is located at the first facet, and wherein the optically resonant cavity has a cavity length that is based on the first motion; and   a tip that is mechanically coupled with the first mirror.   
     
     
         10 . The probe of  claim 9 , wherein the optically resonant cavity further comprises the first facet. 
     
     
         11 . The probe of  claim 9 , wherein the optically resonant cavity further comprises a second mirror, the second mirror being mechanically coupled with the first facet. 
     
     
         12 . The probe of  claim 11  wherein the second mirror comprises a second photonic crystal that is partially transmissive for a first light signal. 
     
     
         13 . The probe of  claim 9  further comprising a first actuator that is operative for imparting a second motion on the first facet. 
     
     
         14 . The probe of  claim 13  further comprising a second actuator that is operative for imparting a third motion on the first facet, wherein the second motion is directed along a first direction and the third motion is directed along a second direction that is substantially orthogonal with the first direction. 
     
     
         15 . The probe of  claim 1  further comprising at least one tether that is mechanically coupled with the first mirror, the at least one tether being dimensioned and arranged to enable the first motion. 
     
     
         16 - 20 . (canceled)