Cleaning apparatus

Abstract

A cleaning and purifying apparatus 40 cleans a cleaning object 51 in cleaning liquid generated by a plasma generator 1 and pours liquid from a water injection portion 60 toward the cleaning object 51 at the end of cleaning.

1 . A cleaning apparatus for cleaning a small electric device, comprising:
 a water injection portion pouring liquid toward a cleaning object at the end of cleaning after the cleaning object is cleaned in a cleaning liquid.   
     
     
         2 . The cleaning apparatus according to  claim 1 , wherein the water injection portion pours the liquid when the cleaning object is exposed. 
     
     
         3 . The cleaning apparatus according to  claim 1 , wherein the water injection portion is positioned above the liquid surface of the cleaning liquid. 
     
     
         4 . The cleaning apparatus according to  claim 1 , wherein the water injection portion is positioned to surround the cleaning object. 
     
     
         5 . The cleaning apparatus according to  claim 1 , wherein
 the cleaning apparatus includes a plasma generator and cleans the cleaning object in a cleaning liquid generated by the plasma generator, the plasma generator including:
 a liquid accommodation portion accommodating liquid including at least water; 
 a gas accommodation portion accommodating gas; 
 a partition wall which separates the liquid accommodation portion from the gas accommodation portion and includes a gas passage that allows the gas in the gas accommodation portion to pass through and introduces the gas to the liquid accommodation portion; 
 a first electrode provided for the gas accommodation portion; 
 a second electrode which is distant from the first electrode and at least a part of which on the side paired with the first electrode is in contact with the liquid in the liquid accommodation portion; 
 a gas supply portion which supplies gas containing at least oxygen to the gas accommodation portion in a mode where the gas of the gas accommodation portion is pressure-fed to the liquid accommodation portion through the gas passage; and 
 a plasma power supply supplying a predetermined voltage between the first and second electrodes and generating discharge between the first and second electrodes to turn into plasma, the gas introduced into the gas accommodation portion in the liquid accommodated in the liquid accommodation portion.