Methods of forming an organic scattering layer, an organic light emitting diode with the scattering layer, and a method of fabricating the organic light emitting diode

Abstract

Provided is a method of fabricating an organic scattering layer. The method may include providing a deposition apparatus with a reaction chamber and a source chamber, loading a substrate in the reaction chamber, supplying carrier gas into the source chamber that may be configured to supply an evaporated organic source material into the reaction chamber, a temperature of the carrier gas ranging from 25° C. to 50° C., and spraying the carrier gas and the evaporated organic source material into the reaction chamber through a showerhead to deposit an organic scattering layer on the substrate, the organic scattering layer including organic particles, which may be provided in a molecularized form of the evaporated organic source material, and thereby having an uneven surface.

1 . A method of fabricating an organic scattering layer, comprising:
 providing a deposition apparatus with a reaction chamber and a source chamber;   loading a substrate in the reaction chamber;   supplying carrier gas into the source chamber that is configured to supply an evaporated organic source material into the reaction chamber, a temperature of the carrier gas ranging from 25° C. to 50° C.; and   spraying the carrier gas and the evaporated organic source material into the reaction chamber through a showerhead to deposit an organic scattering layer on the substrate, the organic scattering layer comprising organic particles, which are provided in a molecularized form of the evaporated organic source material, and thereby having an uneven surface.   
     
     
         2 . The method of  claim 1 , wherein the deposition apparatus is an organic material vapor deposition apparatus. 
     
     
         3 . The method of  claim 1 , wherein the reaction chamber is controlled to have a pressure of about 1.6 Torr in the step of depositing the organic scattering layer. 
     
     
         4 . The method of  claim 1 , wherein the showerhead is provided in the reaction chamber and a temperature thereof is controlled to range from about 200° C. to about 310° C. in the step of depositing the organic scattering layer. 
     
     
         5 . The method of  claim 1 , wherein the forming of the organic scattering layer further comprises supplying dilution gas into the reaction chamber. 
     
     
         6 . The method of  claim 1 , wherein the substrate is controlled to have a temperature of 0° C., in the step of depositing the organic scattering layer. 
     
     
         7 . The method of  claim 1 , wherein the organic particles are made of Tris(8-hydroxyquinolinato) aluminum (Alq 3 ). 
     
     
         8 . A method of fabricating an organic light-emitting diode, comprising:
 forming an anode on a first substrate;   forming an organic light-emitting layer on the anode;   forming a cathode on the organic light-emitting layer;   forming an organic scattering layer on a second substrate using the method of  claim 1 ; and   bonding the second substrate on the cathode in such a way that the organic scattering layer and the cathode are in contact with each other.   
     
     
         9 . The method of  claim 8 , further comprising forming a protection layer on the cathode, before the bonding of the second substrate on the cathode. 
     
     
         10 . The method of  claim 8 , further comprising forming an additional organic scattering layer below the first substrate, before the forming of the anode on the first substrate. 
     
     
         11 . The method of  claim 8 , wherein the organic scattering layer is made of Tris(8-hydroxyquinolinato) aluminum (Alq 3 ). 
     
     
         12 . An organic light-emitting diode, comprising:
 a substrate;   an anode on the substrate;   an organic light-emitting layer on the anode;   a cathode on the organic light-emitting layer; and   an organic scattering layer on the cathode,   wherein the organic scattering layer includes organic particles and thereby has an uneven surface.   
     
     
         13 . The organic light-emitting diode of  claim 12 , wherein the organic scattering layer is made of Tris(8-hydroxyquinolinato) aluminum (Alq 3 ). 
     
     
         14 . The organic light-emitting diode of  claim 12 , further comprising a protection layer between the cathode and the organic scattering layer. 
     
     
         15 . A method of fabricating an organic light-emitting diode, comprising:
 forming an anode on a first substrate;   forming an organic light-emitting layer on the anode;   forming a cathode on the organic light-emitting layer;   forming an organic scattering layer on a second substrate using the method of  claim 2 ; and   bonding the second substrate on the cathode in such a way that the organic scattering layer and the cathode are in contact with each other.   
     
     
         16 . A method of fabricating an organic light-emitting diode, comprising:
 forming an anode on a first substrate;   forming an organic light-emitting layer on the anode;   forming a cathode on the organic light-emitting layer;   forming an organic scattering layer on a second substrate using the method of  claim 3 ; and   bonding the second substrate on the cathode in such a way that the organic scattering layer and the cathode are in contact with each other.   
     
     
         17 . A method of fabricating an organic light-emitting diode, comprising:
 forming an anode on a first substrate;   forming an organic light-emitting layer on the anode;   forming a cathode on the organic light-emitting layer;   forming an organic scattering layer on a second substrate using the method of  claim 4 ; and   bonding the second substrate on the cathode in such a way that the organic scattering layer and the cathode are in contact with each other.   
     
     
         18 . A method of fabricating an organic light-emitting diode, comprising:
 forming an anode on a first substrate;   forming an organic light-emitting layer on the anode;   forming a cathode on the organic light-emitting layer;   forming an organic scattering layer on a second substrate using the method of  claim 5 ; and   bonding the second substrate on the cathode in such a way that the organic scattering layer and the cathode are in contact with each other.   
     
     
         19 . A method of fabricating an organic light-emitting diode, comprising:
 forming an anode on a first substrate;   forming an organic light-emitting layer on the anode;   forming a cathode on the organic light-emitting layer;   forming an organic scattering layer on a second substrate using the method of  claim 6 ; and   bonding the second substrate on the cathode in such a way that the organic scattering layer and the cathode are in contact with each other.