US2014174941A1PendingUtilityA1
Depositing nano-dots on a substrate
Est. expiryAug 30, 2031(~5.1 yrs left)· nominal 20-yr term from priority
H10P 90/1914H10D 62/122B82Y 40/00C25D 5/022C25D 5/02
39
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Claims
Abstract
A method of depositing nano-dots on a substrate includes forming a template on the base, the template defining nano-pores, at least partially filling the nano-pores with a pillar material to define nano-pillars, depositing a dot material on the nano-pillars to define nano-dots on the nano-pillars, and contact printing the substrate with the array of nano-dots.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . A method of depositing nano-dots on a substrate, the method comprising comprising:
forming a template on the base, the template defining nano-pores; at least partially filling the nano-pores with a pillar material to define nano-pillars; depositing a dot material on the nano-pillars to define nano-dots on the nano-pillars; and contact printing the substrate with the array of nano-dots.
2 . The method of claim 1 , wherein the pillar material is deposited to define an array of nano-pillars of substantially uniform height.
3 . The method of claim 2 , wherein the dot material is deposited to define an array of nano-dots of substantially uniform height.
4 . The method of claim 3 , wherein the nano-pillars are deposited to a pillar height and the nano-dots are deposited to a dot height, the pillar height being greater than the dot height.
5 . The method of claim 3 , wherein the nano-pillars have a pillar thickness and the nano-dots have a dot thickness substantially the same as the pillar thickness.
6 . The method of claim 1 , wherein the pillar material is tantalum pentoxide (Ta 2 O 5 ).
7 . The method of claim 1 , wherein the dot material is electrochemically deposition on the pillar material.
8 . The method of claim 1 , wherein the dot material is Ni, Ag, Au, CdSe, ZnSe and ZnS.
9 . A method of depositing nano-dots on a substrate having a substrate surface, the method comprising:
forming a template on a base, the template defining an array of substantially uniform nano-pores; at least partially filling the nano-pores with pillar material to define an array of substantially uniform nano-pillars on the base; depositing dot material on the nano-pillars to define an array of substantially uniform nano-dots on the nano-pillars; bringing the base and substrate together to place the nano-dots into substantially uniform contact with the substrate surface; and separating the base and substrate, the nano-dots separating from the nano-pillars and adhering to the substrate surface to leave the nano-dots on the substrate surface.
10 . The method of claim 9 , wherein at least partially filling the nano-pores includes:
forming a layer of a first oxidizable material; and anodizing the layer of first oxidizable material to grow oxide from the first oxidizable material into the nano-pores.
11 . The method of claim 10 , wherein depositing dot material on the nano-pillars includes electrochemically depositing dot material on the nano-pillars.
12 . The method of claim 11 , wherein electrochemically depositing the dot material on the nano-pillars includes using the nano-pillars as a cathode.
13 . The method of claim 9 , wherein forming a template includes:
forming a layer of a second oxidizable material; and anodizing the layer of second oxidizable material to define the nano-pores.
14 . The method of claim 9 , which further comprises removing the template.
15 . A method of depositing nano-dots on a substrate having a substrate surface, the method comprising:
depositing a first oxidizable material onto a base; depositing a second oxidizable material onto the first oxidizable material; anodizing the second oxidizable material to form a porous oxide having nano-pores that extend through the porous oxide to expose portions of the first oxidizable material; anodizing the first oxidizable material so as to partially fill the nano-pores in the porous oxide with a pillar material including an oxide of the first oxidizable material, thereby forming an array of nano-pillars of substantially uniform height on the base; electrochemically depositing a dot material on the nano-pillars so as further fill the nano-pores in the porous oxide with a dot material different from the pillar material; removing porous oxide by selective etching, thereby yielding a substantially planar array of nano-dots on nano-pillars; bringing the base and substrate together to place the array of nano-dots into substantially uniform contact with the substrate surface; and separating the base and substrate, the nano-dots separating from the nano-pillars and adhering to the substrate surface to leave the array of nano-dots on the substrate surface.Cited by (0)
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