Non-photosensitive siloxane coating for processing hydrophobic photoimageable nozzle plate

Abstract

A method of forming a patterned photoresist layer having a hydrophobic surface is provided. The method includes forming a photoresist layer on a substrate and image patterning. The photoresist layer may comprise a polymeric material. The imaged photoresist layer may then undergo a two-stage post-exposure bake. A surface treatment may be performed on the photoresist layer in between the two-stage post-exposure bake. The surface treatment may include applying a siloxane solution on a partially post-exposure baked photoresist layer. The post-exposure baked photoresist layer may then be developed to form the patterned photoresist layer. The method may be used to form a hydrophobic photoimageable nozzle plate of a micro-fluid ejection head having improved mechanical properties and stable hydrophobic properties.

What is claimed is: 
     
         1 . A micro-fluid ejection head comprising:
 a substrate;   a flow feature layer formed on top of the substrate; and   a photoimageable nozzle plate attached on top of the flow feature layer, the photoimageable nozzle plate having a top surface treated with epoxy functionalized siloxane resin, the treated top surface having a hydrophobic characteristic.   
     
     
         2 . The micro-fluid ejection head of  claim 1 , wherein the photoimageable nozzle plate comprises a polymeric material with photoacid generator. 
     
     
         3 . The micro-fluid ejection head of  claim 1 , wherein the epoxy functionalized siloxane resin comprises a terminal glycidyl ether group. 
     
     
         4 . The micro-fluid ejection head of  claim 1 , wherein the epoxy functionalized siloxane resin comprises a pendant glycidyl ether group. 
     
     
         5 . The micro-fluid ejection head of  claim 1 , wherein the epoxy functionalized siloxane resin comprises a pendant cyclohexene oxide group. 
     
     
         6 . The micro-fluid ejection head of  claim 1 , wherein the epoxy functionalized siloxane resin comprises a terminal cyclohexene oxide group.