Modular Exhaust Gas Header And Method Of Incorporating Same In Design Layout For A Manufacturing Process Machine

Abstract

A modular exhaust gas header designed for use with a process tool having a plurality of exhaust gas points of connection. Embodiments of the modular exhaust gas header include a plurality of branch ducts, at least one for each point of connection in the process tool. Branch ducts, and primary ducts with which they are fluidly connected, may be made from materials designed to withstand exhaust gases that have a high temperature, are corrosive, and/or include volatile solvents. If desired, flow control devices and pressure monitoring instrumentation that selectively measures pressure may be used in each branch duct. The header local to the processing system may be incorporated in a method of designing a layout for a manufacturing process tool and associated exhaust gas handling systems.

What is claimed is: 
     
         1 . A modular exhaust gas header system for use with a semiconductor processing machine having plural exhaust gas points, said system comprising:
 a plurality of branch ducts, each branch duct configured at a first end to be connected to at least one said exhaust gas point of the semiconductor processing machine in fluid communication therewith;   a pressure sensor configured to measure pressure in a selected one of said plurality of branch ducts;   a plurality of impulse lines connected to said branch ducts, with at least one said impulse line fluidly coupling each of said plurality of branch ducts with said pressure sensor; and   at least one primary exhaust gas duct connected to said plurality of branch ducts at a second end to receive exhaust gas therefrom.   
     
     
         2 . A modular exhaust gas header system according to  claim 1 , further comprising at least one flow control device disposed in each of said plurality of branch ducts to adjustably control exhaust gas flow through each said branch duct. 
     
     
         3 . A modular exhaust gas header system according to  claim 2 , wherein each said impulse line is connected to a corresponding branch duct between the first end and the at least one flow control device. 
     
     
         4 . A modular exhaust gas header system according to  claim 2 , further comprising:
 a flow control device disposed in said at least one primary exhaust gas duct;   at least one primary impulse line fluidly coupling said primary exhaust gas duct with said pressure sensor.   
     
     
         5 . A modular exhaust gas header system according to  claim 2 , wherein said pressure sensor comprises a pressure measurement device fluidly communicating with said impulse lines through a multi-position valve, said multi-position valve configured to provide selectable fluid communication between any of said impulse lines and said pressure measurement device. 
     
     
         6 . A modular exhaust header system according to  claim 2 , further comprising a controller configured to provide control information to said plurality of flow control devices, said flow control devices being configured to open and close as a function of control information provided by said controller. 
     
     
         7 . A modular exhaust gas header system according to  claim 6 , wherein said controller communicates with the pressure sensor to receive pressure information therefrom, said control information being a function of pressure measured in a selected branch duct. 
     
     
         8 . A modular exhaust gas header system according to  claim 1 , wherein:
 said at least one primary exhaust gas duct comprises a plurality of primary ducts;   each of said plurality of primary ducts is connected to at least two of said plurality of branch ducts so as to form a header unit; and   said header unit is configured to transport one or more of high-temperature gases, corrosive gases and gases with volatile solvents.   
     
     
         9 . A modular exhaust gas header system according to  claim 8 , further comprising plural exhaust gas main ducts fluidly communicating with the header unit primary ducts, the exhaust gas main ducts configured to deliver said gases to a gas handling system. 
     
     
         10 . A modular exhaust gas header system according to  claim 1 , wherein said plurality of branch ducts and said plurality of primary exhaust gas ducts are resistant to exhaust gases generated in semiconductor processing having at least one of caustic, solvent and high-temperature constituents. 
     
     
         11 . A modular exhaust gas header system for use with a semiconductor processing machine having plural exhaust gas points, said system comprising:
 a plurality of branch ducts, each branch duct configured at a first end to be connected to at least one said exhaust gas point of the semiconductor processing machine in fluid communication therewith;   at least one flow control device disposed in each of said plurality of branch ducts to adjustably control exhaust gas flow through each said branch duct;   at least one said impulse line connected to each of said plurality of branch ducts between the first end and the at least one flow control device;   a multi-position valve fluidly connected to each said impulse line opposite the respective branch ducts for fluid communication with said branch ducts through said impulse lines, said multi-position valve configured for selection of one of said connected impulse lines;   a pressure measurement device fluidly communicating with said multi-position valve for fluid communication with the selected impulse line; and   at least one primary exhaust gas duct connected to said plurality of branch ducts at a second end to receive exhaust gas therefrom.   
     
     
         12 . A modular exhaust header system according to  claim 11 , further comprising:
 plural actuators cooperating with said flow control devices to open and close said devices; and   a controller communicating with the pressure measurement device to receive pressure information with respect to a selected impulse line, and communicating with said plural actuators to provide control information to open and close the flow control devices as a function of pressure measured in the selected impulse line.   
     
     
         13 . A modular exhaust gas header system according to  claim 12 , further comprising:
 a flow control device disposed in said at least one primary exhaust gas duct; and   at least one primary impulse line fluidly coupling said primary exhaust gas duct with said multi-position valve.   
     
     
         14 . A modular exhaust gas header system according to  claim 12 , further comprising at least one exhaust gas main duct fluidly coupled with said at least one primary exhaust gas duct to receive exhaust gas therefrom, said at least one exhaust gas main duct being configured for connection with a gas handling system to deliver exhaust gas thereto. 
     
     
         15 . A modular exhaust gas header system for use with a semiconductor processing machine having plural exhaust gas points, said system comprising:
 a header unit configured to transport one or more of high-temperature gases, corrosive gases and gases with volatile solvents produced in semiconductor processing, the header unit comprising a plurality of branch ducts connected to at least one primary exhaust gas duct for fluid communication there between, each said branch duct having at least one flow control device disposed therein to adjustably control exhaust gas flow through said branch duct, and said branch ducts being configured to be fluidly connected to at least one said exhaust gas point of the semiconductor processing machine at a first end opposite the connection to said at least one primary exhaust gas duct;   a pressure sensor configured to measure pressure in a selected one of said plurality of branch ducts; and   at least one said impulse line connected to each of said plurality of branch ducts at a connection disposed between said first end and the at least one flow control device to fluidly couple each said branch duct with said pressure sensor.   
     
     
         16 . A modular exhaust header system according to  claim 15 , further comprising a controller configured to communicate with the pressure sensor to receive pressure information therefrom, and to provide control information to said plurality of flow control devices, said flow control devices being configured to open and close as a function of control information provided by said controller. 
     
     
         17 . A modular exhaust gas header system according to  claim 16 , wherein said pressure sensor comprises a pressure measurement device fluidly communicating with said impulse lines through a multi-position valve, said multi-position valve configured to provide selectable fluid communication between each said impulse line and said pressure measurement device. 
     
     
         18 . A modular exhaust gas header system according to  claim 15 , further comprising plural exhaust gas main ducts fluidly communicating with the header unit primary ducts, the main ducts configured to deliver said gases to a gas handling system. 
     
     
         19 . A modular exhaust gas header system according to  claim 15 , further comprising:
 a flow control device disposed in said at least one primary exhaust gas duct;   at least one primary impulse line fluidly coupling said primary exhaust gas duct with said pressure sensor.   
     
     
         20 . A method of designing an exhaust gas system for a manufacturing facility having at least one manufacturing process tool with a plurality of exhaust gas points of connection and an exhaust gas handling system, the method comprising:
 determining the location of a manufacturing process tool in a manufacturing facility;   selecting a modular exhaust gas header built outside the manufacturing facility for use with the manufacturing process tool, the modular exhaust gas header having a plurality of branch ducts, at least one for each of the exhaust gas points of connection in the manufacturing tool, so that each of the exhaust gas points of connection of the process tool may be connected to a corresponding respective one of the plurality of branch ducts, the modular exhaust gas header having a primary duct fluidly connected with the plurality of branch ducts;   determining the location of the modular exhaust header with respect to the process tool; and   designing any ductwork connections required for connecting the primary duct with the exhaust gas handling system and for connecting the branch ducts with the exhaust gas points of connection.   
     
     
         21 . A method of installing an exhaust gas system, comprising:
 designing a modular exhaust gas header for use with a first manufacturing process tool having a plurality of exhaust gas points of connection and intended for installation in a manufacturing space, wherein said designing step is performed with respect to the first manufacturing process tool but not with respect to the manufacturing space in which the header will be installed;   fabricating a modular exhaust gas header in a facility separate from the manufacturing space, the header having a plurality of branch ducts, each one of said plurality of branch ducts being designed for attachment to a corresponding one of the plurality of exhaust gas points of connection of the manufacturing process tool;   fluidly connecting the modular exhaust gas header to an exhaust gas handling system for the manufacturing space so that exhaust gases present in the header may be transported to the exhaust gas handling system; and   connecting the modular exhaust gas header in the manufacturing facility to the manufacturing process tool so that each exhaust gas point of connection is fluidly connected to the header so that exhaust gases emitted from each exhaust gas point of connection may be transported to the modular exhaust gas header.