Apparatus for and method of drawing

Abstract

A drawing apparatus accepts a selection manipulation for selecting the type of shape of a light outgoing ratio function defining a relationship between the position of modulation units included in an optical unit as seen in the direction of the arrangement of the modulation units and a light outgoing ratio from among a plurality of shape type candidates. The drawing apparatus then adjusts the light outgoing ratio of each of the modulation units in accordance with the accepted shape type. While emitting a beam of drawing light of a strip-shaped cross-sectional configuration from the optical unit, the drawing apparatus moves the optical unit relative to a substrate in a direction orthogonal to the direction of the longer dimension of the strip-shaped cross section of the drawing light beam to perform a drawing process on the substrate.

What is claimed is: 
     
         1 . A drawing apparatus for directing light onto a substrate with a photosensitive material formed thereon to draw a pattern on the substrate, the drawing apparatus comprising:
 an optical unit configured to move relative to the substrate in a first direction while emitting a beam of drawing light of a strip-shaped cross-sectional configuration, the first direction being orthogonal to a second direction which is the direction of the longer dimension of the strip-shaped cross section of the drawing light beam; and   an adjustment part configured to adjust a distribution of the amount of drawing light as seen in the second direction,   the optical unit including:   a light source part for emitting a beam of light of a strip-shaped cross-sectional configuration, and   a spatial light modulation part including a plurality of modulation units arranged in a line, the spatial light modulation part causing the light beam emitted from the light source part to enter the modulation units in such a manner that the longer dimension of the strip-shaped cross section of the light beam is along the arrangement of the modulation units, the spatial light modulation part causing the modulation units to modulate the incident light beam, thereby forming the drawing light beam,   the adjustment part including:   an acceptance part for accepting a selection manipulation for selecting the type of shape of a light outgoing ratio function from among a plurality of shape type candidates, the light outgoing ratio function being a function defining a relationship between the position of the modulation units as seen in the direction of the arrangement of the modulation units and a light outgoing ratio, the light outgoing ratio being a ratio of the amount of outgoing light to the amount of light incident on the modulation units, and   a light outgoing ratio adjustment part for adjusting the light outgoing ratio of each of the modulation units in accordance with the shape type accepted by the acceptance part.   
     
     
         2 . The drawing apparatus according to  claim 1 , wherein:
 the shape type candidates include a stepped type; and   the stepped type includes a mid-portion where the light outgoing ratio is constant, and a changed portion where the light outgoing ratio is changed in stepped form, the changed portion being continuous with the mid-portion.   
     
     
         3 . The drawing apparatus according to  claim 2 , wherein:
 the acceptance part accepts the specification of the width of the changed portion when the stepped type is selected.   
     
     
         4 . The drawing apparatus according to  claim 2 , wherein:
 the acceptance part accepts the specification of the light outgoing ratio of the changed portion when the stepped type is selected.   
     
     
         5 . The drawing apparatus according to  claim 1 , wherein:
 the shape type candidates include a trapezoidal type; and   the trapezoidal type includes a mid-portion where the light outgoing ratio is constant, and a changed portion where the light outgoing ratio is changed in inclined form, the changed portion being continuous with the mid-portion.   
     
     
         6 . The drawing apparatus according to  claim 5 , wherein:
 the acceptance part accepts the specification of the light outgoing ratio in one or each representative position within the changed portion when the trapezoidal type is selected.   
     
     
         7 . The drawing apparatus according to  claim 1 , wherein:
 the acceptance part causes an acceptance screen displaying the shape type candidates in list form to appear on a determined display device, and accepts the selection manipulation via the acceptance screen.   
     
     
         8 . The drawing apparatus according to  claim 1 , wherein:
 the adjustment part further includes   a registration part for registering information accepted by the acceptance part in association with a processing condition of a process of drawing a pattern on the substrate.   
     
     
         9 . The drawing apparatus according to  claim 6 , wherein:
 the acceptance part accepts the specification of the light outgoing ratio in each of the (n−1) representative positions dividing the changed portion into n (n is an integer equal to or greater than two) equal parts.   
     
     
         10 . The drawing apparatus according to  claims 9 , wherein:
 the acceptance part accepts the specification of the light outgoing ratio in each of the three representative positions dividing the changed portion into four equal parts.   
     
     
         11 . The drawing apparatus according to  claim 7 , wherein:
 the acceptance screen further comprising a region for accepting the light outgoing ratio specifying the shape in the shape type selected from among the plurality of shape type candidates.