Micro pump

Abstract

There is provided a micro pump including a bottom substrate, a channel forming substrate coupled to the bottom substrate and provided with an inlet into which a fluid is introduced and an outlet through which the fluid is discharged, and a valve integrally formed with the channel forming substrate.

What is claimed is: 
     
         1 . A micro pump, comprising:
 a bottom substrate;   a channel forming substrate coupled to the bottom substrate and provided with an inlet into which a fluid is introduced and an outlet through which the fluid is discharged; and   a valve integrally formed with the channel forming substrate.   
     
     
         2 . The micro pump of  claim 1 , wherein a first surface of the channel forming substrate is provided with the inlet and the outlet, and
 a second surface of the channel forming substrate is provided with a pressure chamber that connects the inlet to the outlet.   
     
     
         3 . The micro pump of  claim 2 , further comprising:
 an actuator formed on the first surface of the channel forming substrate and applying pressure to the pressure chamber.   
     
     
         4 . The micro pump of  claim 1 , wherein the bottom substrate and the channel forming substrate are formed of single crystal silicon or silicon on insulator (SOI). 
     
     
         5 . The micro pump of  claim 1 , further comprising:
 an upper substrate coupled to the channel forming substrate.   
     
     
         6 . The micro pump of  claim 5 , wherein the upper substrate is provided with a first hole connected to the inlet and a second hole connected to the outlet. 
     
     
         7 . The micro pump of  claim 1 , wherein the valve includes:
 a thin film member;   a first opening and closing member formed by a first cutting line cutting a portion of the thin film member; and   a second opening and closing member formed by a second cutting line cutting another portion of the thin film member.   
     
     
         8 . The micro pump of  claim 7 , wherein a length of the first cut off line is longer than that of the second cut off line. 
     
     
         9 . The micro pump of  claim 7 , wherein the first cut off line has a curved shape having a first radius, and
 the second cut off line has a curved shape having a second radius.   
     
     
         10 . The micro pump of  claim 9 , wherein the first radius and the second radius have different sizes. 
     
     
         11 . A micro pump, comprising:
 a bottom substrate;   a channel forming substrate coupled to the bottom substrate and provided with an inlet into which a fluid is introduced and an outlet through which the fluid is discharged;   a vibration substrate coupled to the channel forming substrate; and   a valve integrally formed with the channel forming substrate.   
     
     
         12 . The micro pump of  claim 11 , wherein a first surface of the channel forming substrate is provided with the inlet and the outlet, and
 a second surface of the channel forming substrate is provided with a pressure chamber that connects the inlet to the outlet.   
     
     
         13 . The micro pump of  claim 12 , further comprising:
 an actuator formed on the first surface of the channel forming substrate and applying pressure to the pressure chamber.   
     
     
         14 . The micro pump of  claim 11 , wherein the bottom substrate and the channel forming substrate are formed of single crystal silicon or silicon on insulator (SOI). 
     
     
         15 . The micro pump of  claim 11 , further comprising:
 an upper substrate coupled to the channel forming substrate.   
     
     
         16 . The micro pump of  claim 15 , wherein the upper substrate is provided with a first hole connected to the inlet and a second hole connected to the outlet. 
     
     
         17 . The micro pump of  claim 11 , wherein the valve includes:
 a thin film member;   a first opening and closing member formed by a first cut off line cutting off a portion of the thin film member; and   a second opening and closing member formed by a second cut off line cutting off another portion of the thin film member.   
     
     
         18 . The micro pump of  claim 17 , wherein a length of the first cut off line is longer than that of the second cut off line. 
     
     
         19 . The micro pump of  claim 17 , wherein the first cut off line has a curved shape having a first radius, and
 the second cut off line has a curved shape having a second radius.   
     
     
         20 . The micro pump of  claim 19 , wherein the first radius and the second radius have different sizes.