US2014312466A1PendingUtilityA1
Integrated circuit sealing system with broken seal ring
Est. expiryOct 3, 2028(~2.2 yrs left)· nominal 20-yr term from priority
H10W 42/121H10W 42/00H01L 23/562H01L 23/564H10W 74/00
51
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Claims
Abstract
The amount of signal propagation and moisture penetration and corresponding reliability problems due to moisture penetration degradation in an IC can be reduced by fabricating a wide seal ring with a channel having offset ingress and egress portions.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . A sealing system for an integrated circuit, comprising:
a seal ring circumscribing the integrated circuit, the seal ring including at least one channel having an ingress portion and an egress portion, the ingress portion being offset from the egress portion.
2 . The sealing system of claim 1 , further comprising a less heavily doped area within the channel, whereby resistivity to signal propagation across the channel is increased.
3 . The sealing system of claim 1 , where the ingress is separated from the egress by at least 100 μm.
4 . The sealing system of claim 1 , wherein the ingress is separated from the egress by a distance of about 100 μm to about 200 μm.
5 . The sealing system of claim 1 , wherein said at least one channel has a length of about 200 μm to 300 μm.
6 . The sealing system of claim 1 , further comprising a doped area within the channel, wherein the doped area comprises a dopant.
7 . The sealing system of claim 1 , further comprising a first doped area under the seal ring and a second doped area within the channel, wherein the first doped area and the second doped area have the same dopant.
8 . A sealing system for an integrated circuit, comprising:
a seal means circumscribing the integrated circuit, the seal means including at least one separation means having an ingress portion and an egress portion, the ingress portion being offset from the egress portion.
9 . The sealing system of claim 8 , further comprising a less heavily doped area within the separation means, whereby resistivity to signal propagation across the separation means is increased.
10 . The sealing system of claim 8 , where the ingress is separated from the egress by at least 100 μm.
11 . The sealing system of claim 8 , wherein the ingress is separated from the egress by a distance of about 100 μm to about 200 μm.
12 . The sealing system of claim 8 , wherein said at least one channel has a length of about 200 μm to 300 μm.
13 . The sealing system of claim 8 , further comprising a doped area within the channel, wherein the doped area comprises a p+ dopant.
14 . The sealing system of claim 8 , further comprising a first doped area under the seal ring and a second doped area within the channel, wherein the first doped area and the second doped area have the same dopant.Cited by (0)
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