Fluid heating device

Abstract

A fluid heating device for heating chemicals mainly containing sulfuric acid, which is capable of suppressing reduction of heating efficiency even if a fluid mainly containing sulfuric acid is heated, includes a translucent inner tube composed of quartz or the like, a lamp heater disposed in the inner tube, a translucent outer tube disposed outside the inner tube, which is composed of quartz or the like, translucent side plates disposed on both sides of the outer tube, which include quartz or the like, and an amorphous carbon pipe disposed between the outer tube and the inner tube, which functions as a light-absorbing material, wherein the amorphous carbon pipe is disposed so as to be brought into contact with chemicals passing through a space between the outer tube and the inner tube.

1 . A fluid heating device for heating sulfuric acid-based chemicals, comprising:
 a translucent inner tube;   a lamp heater disposed in the inner tube;   a translucent outer tube disposed outside the inner tube;   translucent side plates disposed on both sides of the outer tube;   a light-absorbing material disposed between the outer tube and the inner tube; and   a light reflecting plate disposed on the outer tube and on the outsides of the side plates,   wherein the light-absorbing material is disposed so as to be in contact with chemicals passing through a space between the outer tube and the inner tube,   and wherein the light-absorbing material includes amorphous carbon, colored quartz glass or SiC.   
     
     
         2 . The fluid heating device according to  claim 1 , wherein each of the inner tube, the outer tube and the side plate includes quartz, the inner tube and the outer tube are connected to the side plates, respectively, by welding and they are integrally formed. 
     
     
         3 . The fluid heating device according to  claim 1 , wherein the light-absorbing material forms a passage for the chemicals passing through a space between the outer tube and the inner tube. 
     
     
         4 . The fluid heating device according to  claim 2 , wherein the light-absorbing material forms a passage for the chemicals passing through a space between the outer tube and the inner tube.