Micro pump device

Abstract

There is provided a micro pump device including a micro pump, and a housing receiving the micro pump and provided with a pipe connection port.

What is claimed is: 
     
         1 . A micro pump device, comprising:
 a micro pump; and   a housing receiving the micro pump and provided with a pipe connection port.   
     
     
         2 . The micro pump device of  claim 1 , wherein the micro pump is a displacement pump by thin film Actuator. 
     
     
         3 . The micro pump device of  claim 1 , wherein the micro pump includes a piezoelectric element. 
     
     
         4 . The micro pump device of  claim 1 , wherein the micro pump and the housing are formed of different materials from each other. 
     
     
         5 . The micro pump device of  claim 1 , wherein the micro pump includes:
 a channel forming substrate in which an inlet, an outlet, and a pressure chamber are disposed; and   an actuator disposed on the channel forming substrate and generating a flow of fluid moving from the inlet to the outlet by changing a volume of the pressure chamber.   
     
     
         6 . The micro pump device of  claim 1 , wherein the bottom substrate and the channel forming substrate are a single crystal silicon substrate or a silicon on insulator (SOI) substrate. 
     
     
         7 . The micro pump device of  claim 1 , wherein the housing is formed of a polymer material. 
     
     
         8 . The micro pump device of  claim 1 , further comprising a sealing member disposed between the housing and the micro pump to prevent a fluid from being leaked. 
     
     
         9 . The micro pump device of  claim 1 , wherein the housing is provided with a groove for drawing out a connection wiring connected to the micro pump. 
     
     
         10 . The micro pump device of  claim 1 , wherein an inside of the housing is formed to have a space required to operate an actuator of the micro pump. 
     
     
         11 . The micro pump device of  claim 1 , wherein the housing includes:
 a first housing receiving a portion of the micro pump; and   a second housing receiving a different portion of the micro pump.   
     
     
         12 . A micro pump device, comprising:
 a micro pump;   a housing receiving the micro pump and provided with a pipe connection port; and   a valve member formed in the housing or the micro pump.   
     
     
         13 . The micro pump device of  claim 12 , wherein the micro pump is a thin film displacement type pump. 
     
     
         14 . The micro pump device of  claim 12 , wherein the micro pump includes a piezoelectric element. 
     
     
         15 . The micro pump device of  claim 12 , wherein the micro pump and the housing are formed of different materials from each other. 
     
     
         16 . The micro pump device of  claim 12 , wherein the micro pump includes:
 a channel forming substrate in which an inlet, an outlet, and a pressure chamber are disposed; and   an actuator disposed on the channel forming substrate and generating a flow of fluid moving from the inlet to the outlet by changing a volume of the pressure chamber.   
     
     
         17 . The micro pump device of  claim 12 , wherein the bottom substrate and the channel forming substrate are a single crystal silicon substrate or a silicon on insulator (SOI) substrate. 
     
     
         18 . The micro pump device of  claim 12 , wherein the housing is formed of a polymer material. 
     
     
         19 . The micro pump device of  claim 12 , further comprising a sealing member disposed between the housing and the micro pump to prevent a fluid from being leaked. 
     
     
         20 . The micro pump device of  claim 12 , wherein the housing is provided with a groove for drawing out a connection wiring connected to the micro pump. 
     
     
         21 . The micro pump device of  claim 12 , wherein an inside of the housing is formed to have a space required to operate an actuator of the micro pump. 
     
     
         22 . The micro pump device of  claim 12 , wherein the housing includes:
 a first housing receiving a portion of the micro pump; and   a second housing receiving a different portion of the micro pump.   
     
     
         23 . The micro pump device of  claim 12 , wherein the pipe connection port includes:
 a first pipe connection port connected to an inlet of the micro pump and having a cross sectional area smaller than the inlet; and   a second pipe connection port connected to an outlet of the micro pump and having a cross sectional area larger than the outlet.   
     
     
         24 . The micro pump device of  claim 23 , wherein the valve member is a thin film, provided with a first cutting line formed along an outline of the inlet and a second cutting line formed along an outline of the second pipe connection port.