Isolator

Abstract

An isolator includes: a working chamber in which work is conducted; an atomizer configured to atomize air or a decontamination material in the working chamber: a pump configured to supply the decontamination material to the atomizer; a compressor configured to supply air to the atomizer; a pressure sensor configured to measure an internal pressure of the working chamber; and a control unit configured to perform a leak test, in which the compressor is driven to supply air from the atomizer into the working chamber thereby pressuring the working chamber, and airtightness of the working chamber is tested based on the internal pressure of the working chamber measured by the pressure sensor.

What is claimed is: 
     
         1 . An isolator comprising:
 a working chamber in which work is conducted;   an atomizer configured to atomize air or a decontamination material in the working chamber:   a pump configured to supply the decontamination material to the atomizer;   a compressor configured to supply air to the atomizer;   a pressure sensor configured to measure an internal pressure of the working chamber; and   a control unit configured to perform a leak test, in which the compressor is driven to supply air from the atomizer into the working chamber thereby pressuring the working chamber and airtightness of the working chamber is tested based on the internal pressure of the working chamber measured by the pressure sensor.   
     
     
         2 . The isolator according to  claim 1 , further comprising:
 a first valve provided between the atomizer and the pump, wherein   the control unit configured to close the first valve and then conduct the leak test.   
     
     
         3 . The isolator according to  claim 2 , wherein
 the control unit is configured to, after conducting the leak test, drive the pump and open the first valve, thereby mixing the air and the decontamination material in the atomizer, to be injected into the working chamber.   
     
     
         4 . The isolator according to  claim 1 , further comprising:
 a second valve provided between the atomizer and the compressor, wherein   the control unit is configured to open the second valve and then conduct the leak test.   
     
     
         5 . The isolator according to  claim 2 , further comprising:
 a second valve provided between the atomizer and the compressor, wherein   the control unit is configured to open the second valve and then conduct the leak test.   
     
     
         6 . The isolator according to  claim 3 , further comprising:
 a second valve provided between the atomizer and the compressor, wherein   the control unit is configured to open the second valve and then conduct the leak test.   
     
     
         7 . The isolator according to  claim 1 , further comprising:
 a filter provided between the atomizer and the compressor.   
     
     
         8 . The isolator according to  claim 2 , further comprising:
 a filter provided between the atomizer and the compressor.   
     
     
         9 . The isolator according to  claim 3 , further comprising:
 a filter provided between the atomizer and the compressor.   
     
     
         10 . The isolator according to  claim 4 , further comprising:
 a filter provided between the atomizer and the compressor.   
     
     
         11 . The isolator according to  claim 5 , further comprising:
 a filter provided between the atomizer and the compressor.   
     
     
         12 . The isolator according to  claim 6 , further comprising:
 a filter provided between the atomizer and the compressor.   
     
     
         13 . A method for controlling an isolator, comprising:
 a first step of pressuring a working chamber by driving a compressor to supply air from an atomizer into the working chamber; and   a second step of measuring an internal pressure of the pressurized working chamber with a pressure sensor and testing airtightness of the working chamber.   
     
     
         14 . A method for controlling an isolator according to  claim 13 , further comprising:
 a third step of driving the compressor to supply air to the atomizer and driving a pump to supply a decontamination material to the atomizer, and mixing the air and the decontamination material in the atomizer, to be injected into the working chamber.