Methods for manufacturing polishing pad and polishing apparatus

Abstract

The present invention relates to a method for manufacturing a polishing pad. The method of the invention includes the steps of (a) providing a releasing carrier; (b) providing a foaming resin composition; (c) coating the foaming resin composition of the step (b) on the carrier of the step (a); and (d) curing the foaming resin composition of the step (c). The invention also provides a process for manufacturing a polishing apparatus.

What is claimed is: 
     
         1 . A method for manufacturing a polishing pad comprising:
 (a) providing a carrier, wherein the carrier is a releasing material;   (b) providing a foaming resin composition;   (c) coating the foaming resin composition of the step (b) on the carrier of the step (a); and   (d) curing the foaming resin composition of the step (c).   
     
     
         2 . The method according to  claim 1 , wherein the carrier comprises a polyethylene glycol terephthalate film, a polypropylene film, a polycarbonate film, a polyethylene film, a polyethylene terephthalate film, a releasing paper or a releasing fabric. 
     
     
         3 . The method according to  claim 1 , wherein the carrier is continuously provided. 
     
     
         4 . The method according to  claim 1 , wherein the foaming resin composition comprises a resin, a foaming agent, and a bridging agent. 
     
     
         5 . The method according to  claim 4 , wherein the resin comprises at least one selected from the group consisting of polyurethane, polyolefin, polycarbonate, polyvinyl alcohol, nylon, elastic rubber, polystyrene, poly aromatic molecules, fluorine-containing polymer, polyimide, crosslinked polyurethane, crosslinked polyolefin, polyether, polyester, polyacrylate, elastic polyethylene, polytetrafluoroethene, poly (ethylene terephthalate), poly aromatic amide, polyarylalkene, polymethyl methacrylate, a copolymer thereof, a block copolymer thereof, a mixture thereof, and a blend thereof. 
     
     
         6 . The method according to  claim 1 , wherein the foaming resin composition further comprises a polishing particle. 
     
     
         7 . The method according to  claim 1 , wherein the step (c) comprises blade coating, printing wheel coating, roll extrusion coating or spraying. 
     
     
         8 . The method according to  claim 1 , further comprising a surface finishing step, which is finishing a surface of the cured resin composition in the step (d). 
     
     
         9 . The method according to  claim 1 , further comprising a groove forming step, which is forming at least one groove on a surface of the cured resin composition in the step (d). 
     
     
         10 . The method according to  claim 1 , further comprising a step (e) of removing the carrier. 
     
     
         11 . The method according to  claim 1 , further comprising a step of applying an adhesive on a surface of the cured resin composition. 
     
     
         12 . The method according to  claim 1 , further comprising a step of applying an adhesive on a surface of the carrier. 
     
     
         13 . A process for manufacturing a polishing apparatus, wherein the polishing apparatus comprising:
 a base plate;   a substrate;   a polishing pad, which is adhered on the base plate for polishing the substrate; and   a slurry, which is contacting with the substrate for polishing;   wherein the process comprises the method for manufacturing the polishing pad according to  claim 1 .   
     
     
         14 . The process according to  claim 13 , wherein the carrier comprises a polyethylene glycol terephthalate film, a polypropylene film, a polycarbonate film, a polyethylene film, a polyethylene terephthalate film, a releasing paper or a releasing fabric. 
     
     
         15 . The process according to  claim 13 , wherein the carrier is continuously provided. 
     
     
         16 . The process according to  claim 13 , wherein the foaming resin composition comprises a resin, a foaming agent, and a bridging agent. 
     
     
         17 . The process according to  claim 16 , wherein the resin comprises at least one selected from the group consisting of polyurethane, polyolefin, polycarbonate, polyvinyl alcohol, nylon, elastic rubber, polystyrene, poly aromatic molecules, fluorine-containing polymer, polyimide, crosslinked polyurethane, crosslinked polyolefin, polyether, polyester, polyacrylate, elastic polyethylene, polytetrafluoroethene, poly (ethylene terephthalate), poly aromatic amide, polyarylalkene, polymethyl methacrylate, a copolymer thereof, a block copolymer thereof, a mixture thereof, and a blend thereof. 
     
     
         18 . The process according to  claim 13 , wherein the foaming resin composition further comprises a polishing particle. 
     
     
         19 . The process according to  claim 13 , wherein the step (c) comprises blade coating, printing wheel coating, roll extrusion coating or spraying. 
     
     
         20 . The process according to  claim 13 , further comprising a surface finishing step, which is finishing a surface of the cured resin composition in the step (d). 
     
     
         21 . The process according to  claim 13 , further comprising a groove forming step, which is forming at least one groove on a surface of the cured resin composition in the step (d). 
     
     
         22 . The process according to  claim 13 , further comprising a step (e) of removing the carrier. 
     
     
         23 . The process according to  claim 13 , further comprising a step of applying an adhesive on a surface of the cured resin composition. 
     
     
         24 . The process according to  claim 13 , further comprising a step of applying an adhesive on a surface of the carrier.