Substrate processing sequence in a cartesian robot cluster tool

Abstract

A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, is provided. In one embodiment of the invention, a robot assembly is provided. The robot assembly includes a first motion assembly movable in a first direction, and a second motion assembly, the second motion assembly being coupled to the first motion assembly and being movable relative to the first motion assembly in a second direction that is generally orthogonal to the first direction. The robot assembly further comprises an enclosure disposed in one of the first motion assembly or the second motion assembly, the enclosure containing at least a portion of a vertical actuator assembly, a support plate coupled to the enclosure, and a first transfer robot disposed on the support plate.

1 . A cluster tool for processing a substrate, comprising:
 two or more substrate processing chambers positioned in the cluster tool; and   a robot assembly that is adapted to transfer a substrate to the two or more substrate processing chambers, wherein the robot assembly comprises:
 a robot that is adapted to position the substrate in a first direction, wherein the robot comprises:
 a robot blade having a first end and a substrate receiving surface, wherein the substrate receiving surface is adapted to receive and transport the substrate; 
 a linkage member that has a first pivot point and a second pivot point; 
 a motor that is rotationally coupled to the linkage member at the second pivot point; 
 a first gear attached to the first end of the robot blade and rotationally coupled to the linkage member at the first pivot point; and 
 a second gear coupled to a second motor, the second gear rotationally coupled to the first gear and concentrically aligned with the second pivot point of the linkage, wherein the gear ratio of the second gear to the first gear is between about 3:1 to about 4:3; 
 
 a first motion assembly to position the robot in a second direction that is generally perpendicular to the first direction; and 
 a second motion assembly to position the robot in a third direction that is generally perpendicular to the second direction. 
   
     
     
         2 . The cluster tool of  claim 1 , wherein the first motion assembly comprises a second motor. 
     
     
         3 . The cluster tool of  claim 2 , wherein the second motor is disposed in an enclosure. 
     
     
         4 . The cluster tool of  claim 3 , wherein the enclosure comprises a fan that generates a negative pressure within the enclosure. 
     
     
         5 . The cluster tool of  claim 2 , wherein the second motion assembly comprises a third motor. 
     
     
         6 . The cluster tool of  claim 5 , wherein one of the second motor and the third motor is disposed in an enclosure comprising a fan to generate a negative pressure in the enclosure. 
     
     
         7 . The cluster tool of  claim 2 , further comprising an environmental control assembly having a fan that is adapted to push air through a filter and towards the substrate positioned on the first robot. 
     
     
         8 . An apparatus for transferring substrates in a cluster tool, comprising:
 a first robot that is adapted to position a first substrate at one or more points generally contained within a first plane;   a vertical motion assembly comprising:
 a slide assembly that comprises a block that is coupled to a linear rail which is oriented in a vertical direction; 
 a support plate that is coupled to the block and the first robot; and 
 an actuator that is adapted to vertically position the support plate in a vertical position along a length of the linear rail; and 
   a horizontal motion assembly that is coupled to the vertical motion assembly and has a horizontal actuator that is adapted to position the first robot and the vertical motion assembly in a horizontal direction.   
     
     
         9 . The apparatus of  claim 8 , further comprising a second horizontal motion assembly that is coupled to the vertical motion assembly and has a second horizontal actuator that is adapted to position the first robot and the vertical motion assembly in the horizontal direction. 
     
     
         10 . The apparatus of  claim 8 , further comprising an environmental control assembly having a fan that is adapted to push air through a filter and towards the first substrate positioned on the first robot. 
     
     
         11 . The apparatus of  claim 8 , further comprising:
 a second robot that is adapted to position a second substrate at one or more points generally contained within a second plane; and   the vertical motion assembly further comprising:
 a second support plate that is coupled to the linear rail and the second robot, wherein the second support plate is coupled to the linear rail through the block or a second block that is coupled to the linear rail; and 
 the actuator is further adapted to vertically position the second support plate in a vertical position along the linear rail; 
   wherein the second plane of the second robot is generally parallel to the first plane of the first robot and the second plane is positioned a distance from the first plane.   
     
     
         12 . The apparatus of  claim 8 , wherein the vertical motion assembly further comprises:
 an enclosure having one or more walls that form an internal region that surrounds at least one of the components selected from a group consisting of the actuator and the slide assembly;   a slot formed in one of the one or more walls of the enclosure;   the support plate extending through the slot; and   
       a fan that is further adapted to generate a pressure drop between a point outside the enclosure and the internal region that is between about 0.02 and about 1 inch of water.