US2015114463A1PendingUtilityA1
Thin film solar cell and method of fabricating the same
Assignee: DAEGU GYEONGBUK INST SCIENCEPriority: Aug 22, 2013Filed: Aug 22, 2014Published: Apr 30, 2015
Est. expiryAug 22, 2033(~7.1 yrs left)· nominal 20-yr term from priority
Y02E10/541C23C 14/5806C23C 14/185C23C 14/5866C23C 14/34H10F 77/1694H10F 77/211H10F 10/00H10F 71/00H01L 31/0326H01L 31/022425H01L 31/1868H01L 31/0392H01L 31/1872H01L 31/18Y02P70/50
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Claims
Abstract
Disclosed is a thin film solar cell including a substrate, a first electrode, a light absorbing layer, a buffer layer, a window layer, and a second electrode, wherein a compound layer of M x S y or M x Se y (here, M is metal, and x and y each are a natural number) is present in an interface between the first electrode and the light absorbing layer, the thickness of the compound layer of M x S y or M x Se y being 150 nm or less.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . A thin film solar cell comprising a substrate, a first electrode, a light absorbing layer, a buffer layer, a window layer, and a second electrode,
wherein a compound layer of M x S y or M x Se y (here, M is metal, and x and y each are a natural number) is present in an interface between the first electrode and the light absorbing layer, the thickness of the compound layer of M x S y or M x Se y being 150 nm or less.
2 . The thin film solar cell of claim 1 , wherein M is molybdenum (Mo), nickel (Ni), tungsten (W), cobalt (Co), titanium (Ti), copper (Cu), gold (Au), or an alloy thereof.
3 . The thin film solar cell of claim 1 , wherein M is molybdenum (Mo).
4 . The thin film solar cell of claim of any one of claims 1 to 3 , wherein the thickness of the compound layer of M x S y or M x Se y is 130 nm or less.
5 . The thin film solar cell of claim of any one of claims 1 to 3 , wherein the thickness of the first electrode is 0.2 μm to 5 μm.
6 . The thin film solar cell of claim of any one of claims 1 to 3 , wherein the light absorbing layer is CIS, CIGS, or CZTS.
7 . The thin film solar cell of claim of any one of claims 1 to 3 , wherein the surface roughness of the first electrode is 4 nm or less.
8 . The thin film solar cell of claim of any one of claims 1 to 3 , wherein the sheet resistance value of the first electrode is 0.7 ohms/square or less.
9 . A method for manufacturing a CZTS-based thin film solar cell, the method comprising:
preparing a substrate (S 1 ); forming a first electrode on the substrate (S 2 ); heat-treating the first electrode at a temperature of ⅓*Tm to ½*Tm based on the melting temperature (Tm) of the first electrode (S 3 ); depositing a metallic precursor on the heat-treated first electrode (S 4 ); and heat-treating the deposited metallic precursor layer under sulfurization or selenization gas atmosphere, to form a light absorbing layer (S 5 ).
10 . The method of claim 9 , wherein, after step S 4 , Na and O are present on a surface of the first electrode.
11 . The method of claim 9 , wherein the first electrode is a molybdenum (Mo) thin film.
12 . The method of claim 9 , wherein the temperature for the heat treatment is 400-600° C.
13 . The method of claim 9 , wherein the temperature for the heat treatment is 500-600° C.
14 . The method of claim 9 , wherein the pressure for the heat treatment is 400-760 Torr.
15 . The method of claim 9 , wherein in step S 4 , a CZT-based metallic precursor layer is formed by sequentially depositing a Zn precursor, a Sn precursor, and a Cu precursor on the first electrode.
16 . The method of claim 9 , wherein the metallic precursor layer is formed by any one selected from sputtering, evaporation, chemical vapor deposition, metal organic chemical vapor deposition (MOCVD), close-spaced sublimation (CSS), spray pyrolysis, chemical spraying, screen printing, vacuum-free liquid-phase film deposition, chemical bath deposition (CBD), vapor transport deposition (VTD), and electrodeposition.
17 . The method of claim 9 , further comprising:
forming a buffer layer on the light absorbing layer (S 6 ); forming a window layer on the buffer layer (S 7 ); and forming a second electrode on the window layer (S 8 ).Join the waitlist — get patent alerts
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