Method and apparatus to support process tool modules in processing tools in a cleanspace fabricator

Abstract

The present invention provides various aspects of support for a processing tool in a fabrication facility capable of routine placement and replacement of processing tools and component assemblies of the tools. Support aspects include a support structure for component assemblies and a quick disconnect flange which facilitates connecting and disconnect of electrical, liquid and gas utilities to a tool component placed in the processing tool.

1 - 20 . (canceled) 
     
     
         21 . An apparatus for processing a substrate comprising a chassis for positioning a component assembly portion of a processing tool on a periphery of a primary cleanspace of a fabrication facility, the apparatus comprising:
 the fabrication facility comprising the primary cleanspace;   the processing tool comprising a tool body and a tool port, wherein the processing tool is on the periphery of the primary cleanspace;   the chassis supporting a base plate for mounting the component assembly onto, said chassis comprising an extended position and an operating position, wherein the operating position places the component assembly into the processing tool and the extended position places at least a portion of the component assembly on a periphery of the processing tool;   wherein the base plate comprises a mating surface for receiving the component assembly; and   wherein the extended position positions the component assembly for access and replacement from the periphery of the processing tool.   
     
     
         22 . The apparatus of  claim 21  wherein the mating surface comprises tabs protruding from the surface, wherein the tabs are functional for aligning the component assembly received thereon. 
     
     
         23 . The apparatus of  claim 22  wherein the tabs are additionally operative for providing electrical connection for one or more of: electrical power and data signal to terminals comprising the component assembly. 
     
     
         24 . The apparatus of  claim 21  additionally comprising a flange portion operative to connect utility service conduits to the component assembly, said utility services comprising one or more of: chemical gas supply; liquid supply; electric power supply; and data signal connection. 
     
     
         25 . The apparatus of  claim 24  wherein the flange comprises multiple primary sealing surfaces, each primary sealing surface for supply of a discrete utility service. 
     
     
         26 . The apparatus of  claim 25  wherein the flange additionally comprises one or more secondary sealing surfaces operative to seal a material leaking from the primary sealing surface from entering an ambient atmosphere. 
     
     
         27 . The apparatus of  claim 24  wherein the flange additionally comprises a circular rubber seal around a perimeter of said flange and operative to maintain liquid and gaseous separation between and interior of said flange and an exterior of said flange. 
     
     
         28 . The apparatus of  claim 24  wherein the flange additionally comprises a channel for maintaining a negative atmospheric pressure around a seal containing the chemical gas, said negative atmospheric pressure operative to evacuate any chemical gas leaking from the seal to an area external to the cleanspace. 
     
     
         29 . The apparatus of  claim 21  additionally comprising a rail on which the base plate can slide from the extended position to the operating position. 
     
     
         30 . The apparatus of  claim 21  additionally comprising a substrate carrier. 
     
     
         31 . An apparatus comprising a flange set for connecting a component assembly, the apparatus comprising:
 a fabricator comprising a vertically oriented cleanspace;   a component assembly proximate to a periphery of the vertically oriented cleanspace;   the flange set comprising:
 a first sealing surface connected to multiple conduits, with a primary connection point for each conduit formed in the first sealing surface, 
 a second sealing surface with multiple secondary connection points each secondary connection point positioned to interface with a respective primary connection point, 
 a seal attached to one or more primary connection point, wherein said attachment of the seal isolates an interior defined by the seal from an exterior defined by the seal, 
 one or more areas formed about each secondary connection point for receiving each respective seal when the first sealing surface is brought proximate to the second sealing surface, 
 a fastener for holding the first sealing surface and the second sealing surface; and 
 wherein the extended position positions the component assembly for access and replacement from the periphery of the vertically oriented cleanspace of the fabricator. 
   
     
     
         32 . The apparatus of  claim 31  additionally comprising:
 a contiguous channel circumventing an aggregate of the primary connection points; 
 a channel seal atmospherically sealing an interior area defined by the contiguous channel; 
 a fixture for connecting a source negative atmospheric pressure to the channel; and at least one electronic sensor operative to monitor one or more gases leaking from the primary connection points. 
 
     
     
         33 . The apparatus of  claim 31  additionally comprising:
 a contiguous channel circumventing an aggregate of the primary connection points; 
 a channel seal atmospherically sealing an interior area defined by the contiguous channel; 
 a fixture for connecting a fluid drain to the channel; and 
 electronic sensors operative to monitor one or more fluids leaking from the first sealing surface or the second sealing surface. 
 
     
     
         34 . The apparatus of  claim 31  additionally comprising a substrate carrier. 
     
     
         35 . An apparatus comprising:
 a fabricator comprising a primary cleanspace;   a first support for mounting a component assembly, wherein the first support is located on a periphery of the primary cleanspace, and wherein the first support is capable of removing said component assembly without disturbing integrity of the primary cleanspace, the first support comprising mechanisms for specific location of the component assembly, and mechanisms for connection and disconnection of one or more of: electrical power, data transmission, a gas, a liquid, a powder, and negative atmospheric pressure; and   wherein the first support positions the component assembly for access and replacement from the periphery of the primary cleanspace of the fabricator.   
     
     
         36 . The apparatus of  claim 35  additionally comprising apparatus operative to physically remove and install the component assembly into a processing tool. 
     
     
         37 . The apparatus of  claim 35  wherein the first support is installed into a processing tool body within a cleanspace fabricator. 
     
     
         38 . The apparatus of  claim 35  additionally comprising a substrate carrier. 
     
     
         39 . The apparatus of  claim 38  additionally comprising:
 a second support for mounting a second component assembly, wherein the second support is located on the periphery of the primary cleanspace; 
 wherein the second support is capable of removing the second component assembly without disturbing integrity of the primary cleanspace; 
 wherein the second support comprises mechanisms for specific location of the second component assembly, and mechanisms for connection and disconnection of one or more of: electrical power, data transmission, a gas, a liquid, a powder, and negative atmospheric pressure; 
 wherein the second support positions the component assembly for access and replacement from the periphery of the primary cleanspace of the fabricator; and 
 wherein the second support is located vertically above the first support.