Thermal Diffusion Chamber Control Device and Method

Abstract

Preferably, obtaining internal and external thermal measurement values of a sealed process chamber allows a control system to generate a control signal based on a comparison of the internal and external thermal measurement values to the predetermined value. The control signal is provided to a fluid handling system, wherein the fluid handling system modulates flow of a first fluid around the exterior of the sealed process chamber. The control signal is further provided to a closed loop heat exchange system, wherein the closed loop heat exchange system modulates flow of a second fluid within an interior cavity of the sealed process chamber based on the control signal. The control signal is still further provided to an open loop heat exchange system, wherein the open loop heat exchange system modulates flow of a third fluid within the interior of cavity of the sealed process chamber.

What is claimed is: 
     
         1 . A method of controlling a thermal diffusion chamber by steps comprising:
 monitoring an exterior temperature of a sealed process chamber;   transmitting an exterior thermal measurement value to a control system based on the monitored external temperature of the sealed process chamber;   comparing the external thermal measurement value to a predetermined value;   generating a control signal based on the comparison of the external thermal measurement value to the predetermined value;   providing the control signal to a first fluid handling system, wherein the first fluid handling system modulates flow of a first fluid around the exterior of the sealed process chamber based on the control signal; and   providing the control signal to a second fluid handling system, wherein the second fluid handling system modulates flow of a second fluid within an interior cavity of the sealed process chamber based on the control signal.   
     
     
         2 . The method of  claim 1 , in which the exterior temperature of a sealed process chamber is monitored by steps comprising;
 securing a plurality of thermocouples in contacting adjacency with the sealed process chamber;   attaching electrical lead lines associated with each corresponding thermocouple of the plurality of thermocouples to a control signal buss;   connecting the control signal buss to the control system; and   activating each of the thermocouples of the plurality of thermocouples to indicate monitoring of the exterior temperature of the sealed process chamber.   
     
     
         3 . The method of  claim 1 , in which the control system includes at least:
 the control signal buss communicating with at least the first and second fluid handling systems; and   a controller communicating with the control signal buss, the controller comprising:
 an input/output module communicating with the control signal buss; 
 a processor communicating with the input/output module; 
 a memory storing control logic and communicating with the processor; 
 an input device communicating with the processor; and 
 a display communicating with the processor, wherein upon receipt by the input/output module of the measured external thermal measurement value, the input/output module provides the measured external thermal measurement value to the processor, the processor accesses the stored control logic and determines the control signal based on the measured external thermal measurement value, the processor provides the control signal to the input/output module, the input/output module advances the control signal by way of the control signal buss to each the first and second fluid handling systems. 
   
     
     
         4 . The method of  claim 1 , in which first fluid handling system comprising:
 a first fluid transfer device in fluid communication with at least one fluid inlet box, the at least one fluid inlet box in fluidic communication with an exterior of the sealed process chamber, the at least one fluid inlet box including at least a flow adjustment structure to control a flow of the first fluid around the exterior of the sealed process chamber;   a fluid return conduit in fluid communication with each the exterior of the sealed process chamber and the first fluid transfer device, the fluid return conduit returning the first fluid flowing around the sealed process chamber to the first fluid transfer device;   a thermal sensor communicating with each the returned first fluid and the control system, the thermal sensor measures a temperature value of the returned first fluid and provides said measured temperature value to the control system; and   a control valve disposed between the fluid return conduit and the first fluid transfer device, wherein upon receipt of the temperature value of the returned first fluid by the control system, the control system compares the temperature value of the returned first fluid to a predetermined temperature value and sends a control signal to the control valve, and wherein the control valve modulates flow of the returned first fluid from the exterior of the sealed process chamber to the first fluid transfer device in response to the control signal.   
     
     
         5 . The method of  claim 1 , in which a second fluid handling system comprising:
 a second fluid transfer device in fluid communication with at least one fluid distribution conduit, the at least one fluid distribution conduit in fluidic communication with an interior of the sealed process chamber;   a feed conduit disposed between the second fluid transfer device and the at least one fluid distribution conduit, the feed conduit communicates the second fluid from the second fluid transfer device to the fluid distribution conduit;   a check valve disposed between the feed conduit and the at least one fluid distribution conduit, the check valve mitigating a back flow from the interior of the sealed process chamber to the second fluid transfer device;   an interior fluid control valve disposed between the second fluid transfer device and the at least one fluid distribution conduit to control a flow of the second fluid into the interior of the sealed process chamber;   a fluid collection conduit in fluid communication with the interior of the sealed process chamber and the second fluid transfer device, the fluid collection conduit returning the second fluid flowing into the interior of the sealed process chamber to the second fluid transfer device; and   a thermal sensor communicating with the returned second fluid and the control system, the thermal sensor measures a temperature value of the returned second fluid and provides said measured temperature value to the control system, wherein upon receipt of the temperature value of the returned second fluid by the control system, the control system compares the temperature value of the returned second fluid to a predetermined temperature value and sends an interior fluid control valve signal to the interior fluid control valve, and wherein the interior fluid control valve modulates flow of the returned second fluid from to the second fluid transfer device in response to the interior fluid control valve signal.   
     
     
         6 . A method of controlling a thermal diffusion chamber by steps comprising:
 monitoring each an internal and external temperature of a sealed process chamber;   transmitting each an internal thermal measurement value and an external thermal measurement value to a control system based on the corresponding monitored internal and external temperatures of the sealed process chamber;   comparing each the internal and external thermal measurement values to a predetermined value;   generating a control signal based on the comparison of each the internal and external thermal measurement value to the predetermined value;   providing the control signal to a first fluid handling system, wherein the first fluid handling system modulates flow of a first fluid around the exterior of the sealed process chamber based on the control signal; and   providing the control signal to a second fluid handling system, wherein the second fluid handling system modulates flow of a second fluid within an interior cavity of the sealed process chamber based on the control signal.   
     
     
         7 . The method of  claim 6 , in which each the internal and external temperature of a sealed process chamber is monitored by steps comprising;
 disposing a plurality of internal thermocouples internal to a sensor conduit;   positioning the sensor conduit enclosed internal thermocouples within the sealed process chamber,   attaching a electrical lead lines associated with each corresponding internal thermocouple of the plurality of internal thermocouples to a control signal buss;   connecting the control signal buss to the control system;   securing a plurality of external thermocouples in contacting adjacency with the sealed process chamber;   attaching a electrical lead lines associated with each corresponding external thermocouple of the plurality of external thermocouples to a control signal buss;   connecting the control signal buss to the control system; and   polling each of the external thermocouples of the plurality of thermocouples to indicate monitoring of the exterior temperature of the sealed process chamber.   
     
     
         8 . The method of  claim 6 , in which the control system includes at least;
 the control signal buss communicating with at least the first and second fluid handling systems; and   a controller communicating with the control signal buss, the controller comprising:
 an input/output module communicating with the control signal buss; 
 a processor communicating with the input/output module; 
 a memory storing control logic and communicating with the processor; 
 an input device communicating with the processor; and 
 a display communicating with the processor, wherein upon receipt by the input/output module of each the measured internal and external thermal measurement values, the input/output module provides each the measured internal and external thermal measurement values to the processor, the processor accesses the stored control logic and determines the control signal based collectively on both the measured internal and external thermal measurement values, the processor provides the control signal to the input/output module, the input/output module advances the control signal by way of the control signal buss to each the first and second fluid handling systems. 
   
     
     
         9 . The method of  claim 6 , in which first fluid handling system comprising:
 a first fluid transfer device in fluid communication with at least one fluid inlet box, the at least one fluid inlet box in fluidic communication with an exterior of the sealed process chamber, the at least one fluid inlet box including at least a flow adjustment structure to control a flow of the first fluid around the exterior of the sealed process chamber;   a fluid return conduit in fluid communication with each the exterior of the sealed process chamber and the first fluid transfer device, the fluid return conduit returning the first fluid flowing around the sealed process chamber to the first fluid transfer device;   a thermal sensor communicating with each the returned first fluid and the control system, the thermal sensor measures a temperature value of the returned first fluid and provides said measured temperature value to the control system; and   a control valve disposed between the fluid return conduit and the first fluid transfer device, wherein upon receipt of the temperature value of the returned first fluid by the control system, the control system compares the temperature value of the returned first fluid to a predetermined temperature value and sends a control signal to the control valve, and wherein the control valve modulates flow of the returned first fluid from the exterior of the sealed process chamber to the first fluid transfer device in response to the control signal.   
     
     
         10 . The method of  claim 6 , in which first fluid handling system comprising:
 a second fluid transfer device in fluid communication with at least one fluid distribution conduit, the at least one fluid distribution conduit in fluidic communication with an interior of the sealed process chamber;   a feed conduit disposed between the second fluid transfer device and the at least one fluid distribution conduit, the feed conduit communicates the second fluid from the second fluid transfer device to the fluid distribution conduit;   a check valve disposed between the feed conduit and the at least one fluid distribution conduit, the check valve mitigating a back flow from the interior of the sealed process chamber to the second fluid transfer device;   an interior fluid control valve disposed between the second fluid transfer device and the at least one fluid distribution conduit to control a flow of the second fluid into the interior of the sealed process chamber;   a fluid collection conduit in fluid communication with the interior of the sealed process chamber and the second fluid transfer device, the fluid collection conduit returning the second fluid flowing into the interior of the sealed process chamber to the second fluid transfer device; and   a thermal sensor communicating with the returned second fluid and the control system, the thermal sensor measures a temperature value of the returned second fluid and provides said measured temperature value to the control system, wherein upon receipt of the temperature value of the returned second fluid by the control system, the control system compares the temperature value of the returned second fluid to a predetermined temperature value and sends an interior fluid control valve signal to the interior fluid control valve, and wherein the interior fluid control valve modulates flow of the returned second fluid from to the second fluid transfer device in response to the interior fluid control valve signal.