US2015158139A1PendingUtilityA1
Manufacturing method of glass substrate for magnetic disk, magnetic disk, and magnetic data recording/reproducing device
Est. expirySep 30, 2031(~5.2 yrs left)· nominal 20-yr term from priority
C03C 21/002G11B 5/8404G11B 5/73B24B 37/044G11B 5/73921C09G 1/02C03C 21/008C03C 19/00B24D 3/005A61C 17/00
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Claims
Abstract
A manufacturing method of a glass substrate for a magnetic disk is provided whereby nano pits and/or nano scratches cannot be easily produced in polishing a principal face of a glass substrate using a slurry containing zirconium oxide as an abrasive. The manufacturing method of a glass substrate for a magnetic disk includes, for instance, a polishing step of polishing a principal face of a glass substrate using a slurry containing, as an abrasive, zirconium oxide abrasive grains having monoclinic crystalline structures (M) and tetragonal crystalline structures (T).
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . A manufacturing method of a glass substrate for a magnetic disk, comprising:
a polishing step of executing polishing using a slurry containing yttrium-contained partially stabilized zirconia as an abrasive.
2 . The manufacturing method of a glass substrate for a magnetic disk recited in claim 1 , wherein the abrasive contains yttrium in a range of 1 to 6% by mole.
3 . The manufacturing method of a glass substrate for a magnetic disk recited in claim 1 , wherein the abrasive contains yttrium oxide in a range of 1 to 6% by mole.
4 . The manufacturing method of a glass substrate for a magnetic disk recited in claim 1 , wherein the glass substrate is made of glass, the glass having the fracture toughness value in a range of 0.4 to 1.5 MPa·m 1/2 .
5 . The manufacturing method of a glass substrate for a magnetic disk recited in claim 1 , further comprising:
a post polishing step of polishing using a slurry containing colloidal silica as abrasive grains, the post polishing step configured to be executed after the polishing step.
6 . The manufacturing method of a glass substrate for a magnetic disk recited in claim 5 , wherein a removal stock is set to be less than or equal to 5 μm in the post polishing step.
7 . The manufacturing method of a glass substrate for a magnetic disk recited in claim 5 , further comprising:
an intermediate polishing step of polishing using a slurry containing cerium oxide abrasive grains, the intermediate polishing step being executed between the polishing step and the post polishing step.
8 . The manufacturing method of a glass substrate for a magnetic disk recited in claim 5 , further comprising:
a chemically strengthening step configured to be executed between the polishing step and the post polishing step.
9 . A magnetic disk made of a glass substrate manufactured with the method recited in claim 1 , wherein at least a magnetic layer is formed on a principal face of the glass substrate.
10 . A magnetic recording/reproducing device, comprising:
the magnetic disk recited in claim 9 ; and a magnetic head embedded with a DFH (Dynamic Flying Height) control mechanism.Join the waitlist — get patent alerts
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