Vacuum pump

Abstract

A vacuum pump includes at least one vacuum pump stage having a housing with an inlet, and a rotor having a shaft, with the inlet being arranged radially to the shaft and widening in direction of the shaft.

What is claimed is: 
     
         1 . A vacuum pump, comprising a housing having an inlet, and a rotor having a shaft, wherein the inlet is arranged radially to the shaft and widens in direction of the shaft. 
     
     
         2 . A vacuum pump according to  claim 1 , wherein the vacuum pump comprises at least one of Holweck stage having a one-piece shaft and a stator surrounding the shaft, a cross-thread Holweck stage having a one-piece shaft wherein a delivery structure is formed as one of an opposite thread structure, and a rotor of a turbomolecular pump wherein the delivery structure includes at least one rotor disc and at least one stator disc. 
     
     
         3 . A vacuum pump according to  claim 1 , wherein the vacuum pump comprises a Holweck pump stage having a rotor having a shaft, a hub connected with the shaft, and a sleeve connected with the hub and concentric relative to the shaft, wherein the inlet widens in direction of the sleeve. 
     
     
         4 . A vacuum pump according to  claim 1 , wherein the inlet is formed as an inlet for guiding gas through the inlet in a channel arranged in a rotational direction of the rotor. 
     
     
         5 . A vacuum pump according to  claim 1 , wherein the inlet widens in a rotational direction of the rotor. 
     
     
         6 . A vacuum pump according to  claim 1 , wherein in cross-section, a curved outer profile forms an inlet widening. 
     
     
         7 . A vacuum pump according to  claim 1 , wherein in cross-section, the inlet widens linearly conically. 
     
     
         8 . A vacuum pump according to  claim 1 , wherein the vacuum pump is formed as a molecular vacuum pump. 
     
     
         9 . A vacuum pump according to  claim 1 , wherein the vacuum pump is formed as Holweck pump. 
     
     
         10 . A vacuum pump stage, comprising a housing having an inlet, and a rotor having a shaft, wherein the inlet is arranged radially to the shaft and widens in direction of the shaft. 
     
     
         11 . A vacuum pump stage according to  claim 10 , comprising at least one of Holweck stage having a one-piece shaft and a stator surrounding the shaft, a cross-thread Holweck stage having a one-piece shaft wherein a delivery structure is formed as one of an opposite thread structure, and a rotor of a turbomolecular pump wherein the delivery structure includes at least one rotor disc and at least one stator disc. 
     
     
         12 . A vacuum pump stage according to  claim 10 , wherein the vacuum pump stage comprises a Holweck pump stage having a rotor having a shaft, a hub connected with the shaft, and a sleeve connected with the hub and concentric relative to the shaft, wherein the inlet widens in direction of the sleeve. 
     
     
         13 . A vacuum pump stage according to  claim 10 , wherein the inlet is formed as an inlet for guiding gas through the inlet in a channel arranged in a rotational direction of the rotor. 
     
     
         14 . A vacuum pump stage according to  claim 10 , wherein the inlet widens in a rotational direction of the rotor. 
     
     
         15 . A vacuum pump stage according to  claim 10 , wherein in cross-section, a curved outer profile forms an inlet widening. 
     
     
         16 . A vacuum pump stage according to  claim 10 , wherein in cross-section, the inlet widens linearly conically. 
     
     
         17 . A vacuum pump stage according to  claim 10 , wherein the vacuum pump stage is formed as a molecular vacuum pump stage. 
     
     
         18 . A vacuum pump stage according to  claim 10 , wherein the vacuum pump stage is formed as Holweck pump stage.