Microfabricated Elastomeric Valve and Pump Systems

Abstract

A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

What is claimed is: 
     
         1 . A composite structure comprising:
 a nonelastomer substrate having a surface bearing a first recess;   a flexible elastomer membrane overlying the non-elastomer substrate, the membrane able to be actuated into the first recess; and   a layer overlying the flexible elastomer membrane.   
     
     
         2 . The composite structure of  claim 1  wherein the layer comprises an elastomeric material. 
     
     
         3 . The composite structure of  claim 1  wherein the layer comprises a non-elastomeric material. 
     
     
         4 . The composite structure of  claim 1  wherein the layer defines a second recess overlying the membrane and crossing-over the first recess, such that a variation of a pressure in the channel causes the membrane to be actuated into the first recess. 
     
     
         5 . The composite structure of  claim 1  wherein the first recess comprises a channel.