Laser gas analyzer

Abstract

A laser gas analyzer includes a wavelength-variable laser having a wide wavelength-variable width, a light-split module configured to split an output light of the wavelength-variable laser into a measurement light and a reference light, a first gas cell into which gases to be measured are introduced, and the measurement light is made to be incident, and a data processor configured to obtain an absorption spectrum of each of the gases to be measured based on a reference signal related to the reference light and an absorption signal related to an output light of the first gas cell, and to obtain concentrations of the respective gases to be measured.

What is claimed is: 
     
         1 . A laser gas analyzer configured to analyze gases to be measured in a multicomponent mixed gas by using a tunable diode laser absorption spectroscopy method, comprising:
 a wavelength calibrating gas cell that calibrates wavelengths of an absorption spectrum, wherein   a wavelength calibrating gas, which includes two or more gas components, is sealed in the wavelength calibrating gas cell.   
     
     
         2 . The laser gas analyzer according to  claim 1 , wherein the wavelength calibrating gas includes gas which is the same kind as the gas to be measured. 
     
     
         3 . The laser gas analyzer according to  claim 1 , wherein the wavelength calibrating gas includes an isotope of the gas to be measured. 
     
     
         4 . The laser gas analyzer according to  claim 1 , wherein the wavelength calibrating gas includes CH 4  and C 2 H 4 . 
     
     
         5 . The laser gas analyzer according to  claim 1 , wherein the wavelength calibrating gas is depressurized. 
     
     
         6 . The laser gas analyzer according to  claim 2 , wherein the wavelength calibrating gas is depressurized. 
     
     
         7 . The laser gas analyzer according to  claim 3 , wherein the wavelength calibrating gas is depressurized. 
     
     
         8 . The laser gas analyzer according to  claim 4 , wherein the wavelength calibrating gas is depressurized. 
     
     
         9 . A laser gas analyzer, comprising:
 a wavelength-variable laser having a wavelength-variable width to cover a range of wavelengths;   a light-split module configured to split an output light of the wavelength-variable laser into a measurement light and a reference light;   a measurement gas cell into which the multicomponent mixed gas is introduced, and into which the measurement light is made to be incident;   a data processor configured to obtain an absorption spectrum of each component of the gases to be measured included in the multicomponent mixed gas based on a reference signal related to the reference light and an absorption signal related to an output light of the measurement gas cell, and to obtain concentrations of the respective components of the gases to be measured; and   a wavelength calibrating gas cell that calibrates wavelengths of an absorption spectrum, in which a wavelength calibrating gas including two or more gas components is sealed, wherein   the wavelength calibrating gas cell is placed in front of the light-split module.