Micropump

Abstract

There is provided a micropump, including: a substrate; a pressure chamber formed in the substrate; and a connecting flow channel connected to the pressure chamber and extended in a vertical direction with respect to a radial direction of the pressure chamber.

What is claimed is: 
     
         1 . A micropump, comprising:
 a substrate;   a pressure chamber formed in the substrate; and   a connecting flow channel connected to the pressure chamber and extended in a vertical direction with respect to a radial direction of the pressure chamber.   
     
     
         2 . The micropump of  claim 1 , wherein the pressure chamber has a circular shape, an oval shape, or a shape formed by curves having one or more radii of curvature. 
     
     
         3 . The micropump of  claim 1 , wherein the connecting flow channel includes one or more expansion parts. 
     
     
         4 . The micropump of  claim 3 , wherein the connecting flow channel is connected to the pressure chamber in the expansion parts. 
     
     
         5 . The micropump of  claim 1 , further comprising an upper substrate disposed on the substrate and having an inlet and an outlet connected to the connecting flow channel. 
     
     
         6 . The micropump of  claim 1 , further comprising a piezoelectric actuator disposed on the substrate. 
     
     
         7 . A micropump, comprising:
 a substrate;   a pressure chamber formed in the substrate; and   a connecting flow channel connected to the pressure chamber and having a curved shape.   
     
     
         8 . The micropump of  claim 7 , wherein the pressure chamber has a circular shape, an oval shape, or a shape formed by curves having one or more radii of curvature. 
     
     
         9 . The micropump of  claim 7 , wherein the connecting flow channel is formed by a curve circumscribed with the pressure chamber. 
     
     
         10 . The micropump of  claim 7 , wherein the connecting flow channel is formed by a curve inscribed in the pressure chamber. 
     
     
         11 . The micropump of  claim 7 , wherein the connecting flow channel includes one or more expansion parts. 
     
     
         12 . The micropump of  claim 11 , wherein the connecting flow channel is connected to the pressure chamber in the expansion parts. 
     
     
         13 . The micropump of  claim 7 , further comprising an upper substrate disposed on the substrate and having an inlet and an outlet connected to the connecting flow channel. 
     
     
         14 . The micropump of  claim 7 , further comprising a piezoelectric actuator disposed on the substrate.