Coated Tool

Abstract

A coated tool includes a substrate and a coating layer disposed on a surface of the substrate. The coating layer includes a first stack structure ( 3 ) and a second stack structure ( 4 ). The first stack structure has two or more kinds of layers with different compositions periodically stacked with an average layer thickness of 60-500 nm. The second stack structure has two or more kinds of layers with different compositions periodically stacked with an average layer thickness of 2 nm to less than 60 nm. The layers in each stack structure include at least one selected from the group consisting of metal elements Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Al, Si, Sr, Y, Sn and Bi; and compounds including at least one of these metal elements and at least one non-metal element selected from carbon, nitrogen, oxygen and boron.

1 . A coated tool comprising a substrate and a coating layer disposed on a surface of the substrate, the coating layer including a first stack structure and a second stack structure,
 the first stack structure having a structure in which two or more kinds of layers with different compositions are periodically stacked wherein the average layer thickness of each of the layers is 60 nm to 500 nm,   the second stack structure having a structure in which two or more kinds of layers with different compositions are periodically stacked wherein the average layer thickness of each of the layers is 2 nm to less than 60 nm,   the layers constituting the first stack structure and the layers constituting the second stack structure including at least one selected from the group consisting of a metal including at least one metal element selected from Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Al, Si, Sr, Y, Sn and Bi; and compounds including at least one of these metal elements and at least one non-metal element selected from carbon, nitrogen, oxygen and boron.   
     
     
         2 . The coated tool according to  claim 1 , wherein the first stack structure is an alternate stack structure including two kinds of layers with different compositions stacked alternately each in two or more layers. 
     
     
         3 . The coated tool according to  claim 1 , wherein the second stack structure is an alternate stack structure including two kinds of layers with different compositions stacked alternately each in two or more layers. 
     
     
         4 . The coated tool according to  claim 1 , wherein the coating layer includes a structure including the first stack structures and the second stack structures stacked alternately and continuously each in two or more structures. 
     
     
         5 . The coated tool according to  claim 1  any one of  claims 1  to  4 , wherein (T 1 -T 2 ) is 20 nm to 996 nm wherein T 1  is the average value of the stacking periods in the first stack structure and T 2  is the average value of the stacking periods in the second stack structure. 
     
     
         6 . The coated tool according to  claim 1 , wherein the layers constituting the first stack structure and the layers constituting the second stack structure each include at least one selected from the group consisting of metals including at least two metal elements selected from Ti, Nb, Ta, Cr, W, Al, Si, Sr and Y; and compounds including at least two of these metal elements and at least one non-metal element selected from carbon, nitrogen, oxygen and boron. 
     
     
         7 . The coated tool according to  claim 1 , wherein the metal elements present in the layers constituting the first stack structure are identical among the layers constituting the first stack structure and
 include one or more metal elements having a difference in absolute value of 5 at % or more between the ratio thereof relative to the total of the metal elements present in one layer constituting the first stack structure and the ratio of the identical metal element relative to the total of the metal elements present in a layer constituting the first stack structure which layer is adjacent to the one layer.   
     
     
         8 . The coated tool according to  claim 1 , wherein the metal elements present in the layers constituting the second stack structure are identical among the layers constituting the second stack structure and
 include one or more metal elements having a difference in absolute value of 5 at % or more between the ratio thereof relative to the total of the metal elements present in one layer constituting the second stack structure and the ratio of the identical metal element relative to the total of the metal elements present in a layer constituting the second stack structure which layer is adjacent to the one layer.   
     
     
         9 . The coated tool according to  claim 1 , wherein one layer constituting the first stack structure contains one or more metal elements different from the metal element or elements present in a layer constituting the first stack structure which layer is adjacent to the one layer. 
     
     
         10 . The coated tool according to  claim 1 , wherein one layer constituting the second stack structure contains one or more metal elements different from the metal element or elements present in a layer constituting the second stack structure which layer is adjacent to the one layer. 
     
     
         11 . The coated tool according to  claim 1 , wherein the average total layer thickness of the entirety of the coating layer is 0.22 to 12 μm. 
     
     
         12 . The coated tool according to  claim 1 , wherein the average thickness of the first stack structure is 0.2 to 6 μm. 
     
     
         13 . The coated tool according to  claim 1 , wherein the average thickness of the second stack structure is 0.02 to 6 μm. 
     
     
         14 . The coated tool according to  claim 2 , wherein the coating layer includes a structure including the first stack structures and the second stack structures stacked alternately and continuously each in two or more structures. 
     
     
         15 . The coated tool according to  claim 3 , wherein the coating layer includes a structure including the first stack structures and the second stack structures stacked alternately and continuously each in two or more structures. 
     
     
         16 . The coated tool according to  claim 4 , wherein the layers constituting the first stack structure and the layers constituting the second stack structure each include at least one selected from the group consisting of metals including at least two metal elements selected from Ti, Nb, Ta, Cr, W, Al, Si, Sr and Y; and compounds including at least two of these metal elements and at least one non-metal element selected from carbon, nitrogen, oxygen and boron. 
     
     
         17 . The coated tool according to  claim 4 , wherein the metal elements present in the layers constituting the first stack structure are identical among the layers constituting the first stack structure and
 include one or more metal elements having a difference in absolute value of 5 at % or more between the ratio thereof relative to the total of the metal elements present in one layer constituting the first stack structure and the ratio of the identical metal element relative to the total of the metal elements present in a layer constituting the first stack structure which layer is adjacent to the one layer.   
     
     
         18 . The coated tool according to  claim 16 , wherein the metal elements present in the layers constituting the first stack structure are identical among the layers constituting the first stack structure and
 include one or more metal elements having a difference in absolute value of 5 at % or more between the ratio thereof relative to the total of the metal elements present in one layer constituting the first stack structure and the ratio of the identical metal element relative to the total of the metal elements present in a layer constituting the first stack structure which layer is adjacent to the one layer.   
     
     
         19 . The coated tool according to  claim 4 , wherein the metal elements present in the layers constituting the second stack structure are identical among the layers constituting the second stack structure and
 include one or more metal elements having a difference in absolute value of 5 at % or more between the ratio thereof relative to the total of the metal elements present in one layer constituting the second stack structure and the ratio of the identical metal element relative to the total of the metal elements present in a layer constituting the second stack structure which layer is adjacent to the one layer.   
     
     
         20 . The coated tool according to  claim 16 , wherein the metal elements present in the layers constituting the second stack structure are identical among the layers constituting the second stack structure and
 include one or more metal elements having a difference in absolute value of 5 at % or more between the ratio thereof relative to the total of the metal elements present in one layer constituting the second stack structure and the ratio of the identical metal element relative to the total of the metal elements present in a layer constituting the second stack structure which layer is adjacent to the one layer.