Mems gyroscope

Abstract

A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism and a magnetic source that is associated with the proof-mass. The magnetic sensing mechanism is disposed at a location wherein the magnetic field gradient from the magnetic source is maximum.

We claim: 
     
         1 . A MEMS gyroscope, comprising:
 a first substrate having a movable portion that is movable in response to an external angular velocity, said movable portion comprising a magnetic source for generating a magnetic field; and   a second substrate having a magnetic sensor for detecting the magnetic field from said magnetic source, wherein the magnetic sensor is at a location that has the maximum gradient of said magnetic field in the direction normal to the first and second substrates.   
     
     
         2 . The MEMS gyroscope of  claim 1 , wherein the magnetic source comprises a conductive wire to which current can be applied so as to generate a magnetic field. 
     
     
         3 . The MEMS gyroscope of  claim 1 , wherein the magnetic source comprises a magnetic nanoparticle. 
     
     
         4 . The MEMS gyroscope of  claim 2 , wherein the magnetic sensor comprises a giant-magnetic-resistor. 
     
     
         5 . The MEMS gyroscope of  claim 2 , wherein the magnetic sensors comprises a spin-valve structure. 
     
     
         6 . The MEMS gyroscope of  claim 2 , wherein the magnetic sensors comprises a tunnel-magnetic-resistor. 
     
     
         7 . The MEMS gyroscope of  claim 2 , wherein the magnetic sensors comprises a magnetic pickup coil that is an element of a fluxgate.