Mems microphone with springs and interior support

Abstract

A MEMS microphone has a stationary portion with a backplate having a plurality of apertures, and a diaphragm spaced from the backplate and having an outer periphery. As a condenser microphone, the diaphragm and backplate form a variable capacitor. The microphone also has a post extending between, and substantially permanently connected with, both the backplate and the diaphragm, and a set of springs securing the diaphragm to at least one of the post and the stationary portion. The post is positioned to be radially inward of the outer periphery of the diaphragm.

What is claimed is: 
     
         1 . A MEMS microphone comprising:
 a stationary portion comprising a backplate having a plurality of apertures;   a diaphragm spaced from the backplate and having an outer periphery and a region radially inward of the outer periphery, the diaphragm and backplate forming a variable capacitor,   a fixed area of the radially inward region being substantially unmovable relative to the stationary portion in response to an incident acoustic signal on the diaphragm,   a movable area of the radially inward region being movable relative to the stationary portion in response to an incident acoustic signal; and   a set of springs securing the diaphragm to the stationary portion.