Retaining ring assembly with inserts

Abstract

A generally annular retaining ring assembly having a retaining ring and a backing ring, the backing ring having an upper portion, an inner portion, an outer portion and a lower portion, wherein the inner portion, outer portion and the lower portion form a receiving channel configured to receive a plurality of inserts. The backing ring may be made of a polymeric material and the inserts may be made of a material such as, for example, stainless steel, that provides additional rigidity and heat dissipation to the polymeric backing ring. The inserts absorb the deforming forces exerted when the retaining ring assembly is fastened to the carrier head of a polishing device. However, the inserts are secured within the retaining channel in the underside of the backing ring so that the inserts are isolated from the chemicals present during polishing.

What is claimed is: 
     
         1 . A retaining ring assembly for chemical mechanical polishing comprising:
 a substantially annular backing ring having an upper portion, a lower portion, an inner portion and an outer portion, wherein the lower portion, the inner portion and the outer portion are configured with a retaining grove;   substantially annular inserts located within the retaining groove;   a substantially annular retaining ring configured to cover the retaining groove so that chemicals used during processing cannot enter the retaining grove.   
     
     
         2 . The retaining ring assembly of  claim 1 , wherein the backing ring is secured to the retaining ring using an attachment device. 
     
     
         3 . The retaining ring assembly of  claim 1 , wherein said backing ring is made from polycarbonate, polyethylene terpthalate, polyethersulphone, polyetheretherketone, or polyphenelynesulfide. 
     
     
         4 . The retaining ring assembly of  claim 1 , wherein the backing ring is made of a material having a hardness between 80 and 120 durometers. 
     
     
         5 . The retaining ring assembly of  claim 1 , wherein the backing ring is made of a material having durometer readings between 80 and 120. 
     
     
         6 . The retaining ring assembly of  claim 1 , wherein said inserts are made of stainless steel. 
     
     
         7 . The retaining ring assembly of  claim 1 , wherein said inserts are made from a material which deforms less during stress than the backing ring. 
     
     
         8 . The retaining ring assembly of  claim 1 , wherein said inserts are affixed in said receiving groove through use of an adhesive, press-fit features, injection molding, over-molding, or ultrasonic welding. 
     
     
         9 . The retaining ring assembly of  claim 1 , wherein the mass of the inserts is at least 20% greater than the mass of the backing ring.