Precursor sol-gel solution, electromechanical transducer element, liquid droplet discharge head, and inkjet recording apparatus

Abstract

A precursor sol-gel solution is provided that has been subjected to a partial hydrolysis process and is used for forming an oxide dielectric film having a perovskite structure represented by the general formula ABO 3 . The precursor sol-gel solution is subjected to a stabilization process for controlling a viscosity change resulting from the partial hydrolysis process to be less than or equal to 50%, and water contained in the precursor sol-gel solution is controlled to be greater than or equal to 0.50 times and less than or equal to 10 times by molar ratio with respect to a B site atom contained in the precursor sol-gel solution.

What is claimed is: 
     
         1 . A precursor sol-gel solution that has been subjected to a partial hydrolysis process and is used for forming an oxide dielectric film having a perovskite structure represented by a general formula ABO 3 , the precursor sol-gel solution comprising:
 water and a B site atom;   wherein a viscosity change resulting from the partial hydrolysis process is controlled to be less than or equal to 50%, and the water contained in the precursor sol-gel solution is controlled to be greater than or equal to 0.50 times and less than or equal to 10 times by molar ratio with respect to the B site atom contained in the precursor sol-gel solution.   
     
     
         2 . The precursor sol-gel solution as claimed in  claim 1 , further comprising:
 an A site atom corresponding to lead (Pb) and the B site atom corresponding to at least one of zirconium (Zr) and titanium (Ti).   
     
     
         3 . The precursor sol-gel solution as claimed in  claim 1 , wherein the precursor sol-gel solution is discharged from a nozzle of a liquid droplet discharge apparatus included in a thin film fabrication apparatus. 
     
     
         4 . An oxide dielectric film having a perovskite structure represented by a general formula ABO 3 , the oxide dielectric film comprising:
 a coating of a precursor sol-gel solution that has been subjected to a stabilization process and a partial hydrolysis process;   wherein a viscosity change resulting from the partial hydrolysis process is controlled to be less than or equal to 50% in the stabilization process, and water contained in the precursor sol-gel solution is controlled to be greater than or equal to 0.50 times and less than or equal to 10 times by molar ratio with respect to a B site atom contained in the precursor sol-gel solution.   
     
     
         5 . A liquid discharge head comprising:
 the oxide dielectric film as claimed in  claim 4  as an electromechanical transducer element.   
     
     
         6 . An inkjet recording apparatus comprising:
 the liquid discharge head as claimed in  claim 5 .   
     
     
         7 . A deflecting mirror comprising:
 the oxide dielectric film as claimed in  claim 4  as an electromechanical transducer element.   
     
     
         8 . An acceleration sensor comprising:
 the oxide dielectric film as claimed in  claim 4  as an electromechanical transducer element.   
     
     
         9 . An HDD head fine adjustment device comprising:
 the oxide dielectric film as claimed in  claim 4  as an electromechanical transducer element.   
     
     
         10 . An angular velocity sensor comprising:
 the oxide dielectric film as claimed in  claim 4  as an electromechanical transducer element.   
     
     
         11 . A micropump comprising:
 the oxide dielectric film as claimed in  claim 4  as an electromechanical transducer element.   
     
     
         12 . A microvalve comprising:
 the oxide dielectric film as claimed in  claim 4  as an electromechanical transducer element.   
     
     
         13 . A method of fabricating a precursor sol-gel solution that is used for forming an oxide dielectric film having a perovskite structure represented by a general formula ABO 3 , the method comprising:
 a stabilization process step of suppressing a viscosity change resulting from a partial hydrolysis process step; and   the partial hydrolysis process step;   wherein the viscosity change before and after the partial hydrolysis process step is controlled to be less than or equal to 50%, and water contained in the precursor sol-gel solution after the partial hydrolysis process step is controlled to be greater than or equal to 0.50 times and less than or equal to 10 times by molar ratio with respect to a B site atom contained in the precursor sol-gel solution.   
     
     
         14 . The method as claimed in  claim 13 , wherein the partial hydrolysis process step includes adding water or an aqueous solution to the precursor sol-gel solution.