Instrumented Platform for Vibration-Sensitive Equipment

Abstract

A platform that includes a vibration sensor located within an inner core of a table. The table may have a first plate that supports a vibration-sensitive payload. The first plate may be separated from a second plate by the inner core. The sensor can be located within the core directly below the device. The sensor can be connected to an electrical connector attached to an external surface of the table. A monitor can be readily plugged into the electrical connector to obtain vibration data from the sensor. The platform may also include a damper located within the inner core to reduce vibration of the table. The damper may be an active device that is connected to control circuits located within, or outside, the inner core.

1 - 25 . (canceled) 
     
     
         26 . A platform assembly that supports a vibration-sensitive payload, comprising:
 a tabletop that includes a first plate coupled to the vibration-sensitive payload, a second plate, and an inner core located between the first plate and second plate;   one or more vibration sensors positioned within the inner core of the tabletop;   a controllable damper positioned within the inner core of the tabletop and in communication with the first plate and the sensors, the damper having an actuator configured to induce a vibration that offsets and cancels a vibration within the tabletop; and   a control circuit in communication with the sensors and the damper, the control circuit configured to process a signal from the sensor and provide an excitation signal to the damper to generate an offsetting vibration that cancels tabletop vibration.   
     
     
         27 . The platform assembly of  claim 26  wherein the first plate includes one or more threaded apertures configured to enable the vibration-sensitive equipment to be coupled to the tabletop. 
     
     
         28 . The platform assembly of  claim 26  wherein the vibration sensors are in communication with the first plate. 
     
     
         29 . The platform assembly of  claim 26  wherein the sensors are selected from the group consisting of accelerometers, velocimeters, geophones, and displacement sensors. 
     
     
         30 . The platform assembly of  claim 26  wherein the damper comprises:
 an actuator housing positioned within the inner core and coupled to the first plate; 
 an actuator within the actuator housing; and 
 a magnet mass coupled to the actuator housing by a pair of flexible diaphragms, the magnet mass and flexible diaphragms forming a spring/mass assembly, the spring/mass assembly in communication with the actuator and configured to generate the offsetting vibration when excited by the actuator. 
 
     
     
         31 . The platform assembly of  claim 30  wherein actuator is selected from the group consisting of electromagnetic shakers, electromagnetic shakers with a moving magnet mass and a stationary coil, electromagnetic shakers with stationary magnet masses and moving coils, electrodynamic designs with one stationary coil and one moving coil, piezo-actuators, and stiff actuators. 
     
     
         32 . The platform assembly of  claim 26  wherein the control circuit further includes at least one device selected from the group consisting of amplifiers, compensators, and filters.