Precision Pump With Multiple Heads

Abstract

A pump for one or more different process fluids is provided including a pumping chamber having a process fluid inlet and outlet coupled to a process fluid valve on each pumping chamber for selectively preventing and allowing flow of process fluid through the pumping chamber. An actuation mechanism for pumping actuating fluid to actuating fluid chambers is provided that is in communication with the actuating fluid chambers to permit flow into each actuating fluid chamber of incompressible actuating fluid. A diaphragm separates each pumping chamber from an associated actuating fluid chamber for separating process fluid from actuating fluid. The actuation mechanism is removable by a quick disconnect that provides for disconnection of the activation mechanism without affecting process fluid. Operation of the actuation mechanism to displace actuating fluid causes actuating fluid to flow only into each actuating fluid chamber having an opened process fluid valve, resulting in pumping.

1 - 30 . (canceled) 
     
     
         31 . A pump for use in handling at least one of a plurality of different process fluids, comprising:
 a plurality of pumping chambers, each pumping chamber adapted to independently pump one of the plurality of different process fluids, each pumping chamber including a process fluid inlet and a process fluid outlet,   a process fluid valve associated with each pumping chamber, the process fluid outlet coupled to the process fluid valve for selectively preventing and allowing the flow of process fluid through the pumping chamber;   a filter for receiving process fluid from a first one of the plurality of pumping chambers, wherein said filter removes particulates from the process fluid to form a filtered process fluid;   a reservoir for receiving said filtered process fluid, wherein a second one of said plurality of pumping chambers pumps filtered process fluid from said reservoir storing filtered process fluid;   a plurality of isolation valves, each isolation valve for selectively preventing and allowing the flow of an actuation fluid; and   a recirculation pathway with an associated recirculation valve, said recirculation valve downstream of said second one of the plurality of pumping chambers and the recirculation pathway for recirculating the filtered process fluid to said first one of the plurality of pumping chambers.   
     
     
         32 . A pump for use in handling at least one of a plurality of different process fluids, comprising:
 a plurality of pumping chambers, each pumping chamber adapted to independently pump one of the plurality of different process fluids, each pumping chamber including a process fluid inlet and a process fluid outlet,   a process fluid valve associated with each pumping chamber, the process fluid outlet coupled to the process fluid valve for selectively preventing and allowing the flow of process fluid through the pumping chamber;   a filter for receiving process fluid from a first one of the plurality of pumping chambers, wherein said filter removes particulates from the process fluid to form a filtered process fluid, said filter storing filtered process fluid,   a second one of the plurality of pumping chambers for pumping filtered process fluid from said filter storing filtered process fluid;   a plurality of isolation valves, each isolation valve for selectively preventing and allowing the flow of an actuation fluid; and   a recirculation pathway with an associated recirculation valve, said recirculation valve downstream of said second one of the plurality of pumping chambers and the recirculation pathway for recirculating the filtered process fluid to said first one of the plurality of pumping chambers.   
     
     
         33 . A pump for use in handling at least one of a plurality of different process fluids, comprising:
 a plurality of pumping chambers, each pumping chamber adapted to independently pump one of the plurality of different process fluids, each pumping chamber including a process fluid inlet and a process fluid outlet,   a process fluid valve associated with each pumping chamber, the process fluid outlet coupled to the process fluid valve for selectively preventing and allowing the flow of process fluid through the pumping chamber;   a plurality of isolation valves, each isolation valve for selectively preventing and allowing the flow of an actuation fluid;   wherein each isolation valve is a proportional control valve to enable dispensing out of a plurality of pumping heads simultaneously, at at least one flow rate, using a single actuating mechanism.