Lithographic printing system with placement corrections

Abstract

The technology disclosed relates to methods and devices that compensate for displacements in a pattern or deformations of a workpiece. In particular, this relates to using timing to compensate for displacements along a first axis along the scanning direction while using resampling, interpolation or a similar method to compensate for displacements along a second axis that is substantially orthogonal to the first axis. The scanning direction may be an actual direction of movement of the scanning head or it may be a direction perpendicular to an orientation of an image projected onto a workpiece.

We claim as follows:  
     
         1 . A method of inspecting a workpiece, the method including:
 rotating a rotor assembly comprising two or more rotor arms over a workpiece,   wherein the rotor arms extend from and rotate about a hub;   relaying image information from a portion of a surface of the workpiece through relay optics located on one of the rotor arms and the hub to an optical analytical instrument.   
     
     
         2 . The method of  claim 1 , wherein optical analytical instrument is stationary relative to the rotor arms. 
     
     
         3 . The method of  claim 1 , further including:
 determining flatness or smoothness of the workpiece with the image information relayed to the optical analytical instrument.   
     
     
         4 . The method of  claim 1 , further including:
 verifying pattern integrity for a pattern patterned on the workpiece from the image information relayed to the optical analytical instrument.   
     
     
         5 . The method of  claim 1 , further including:
 illuminating the portion of the workpiece by providing illumination from an illumination source near or at the hub and through the relay optics.   
     
     
         6 . A device for inspecting a workpiece, the device including:
 a rotor assembly comprising two or more rotor arms extending from and configured to rotate about a hub;   relay optics, located on one of the rotor arms and the hub, and configured to relay image information from a portion of a surface of the workpiece to an optical analytical instrument.   
     
     
         7 . The device of  claim 6 , wherein the optical analytical instrument is stationary relative to the rotor arms. 
     
     
         8 . The device of  claim 6 , further including:
 a memory;   a processor coupled to the memory; and   a first module running on the processor that determines flatness or smoothness of the workpiece with image information relayed to the optical analytical instrument.   
     
     
         9 . The device of  claim 6 , further including:
 a memory;   a processor coupled to the memory; and   a first module running on the processor that verifies pattern integrity for a pattern patterned on the workpiece from image information relayed to the optical analytical instrument.   
     
     
         10 . The device of  claim 6 , further including:
 an illumination source near or at the hub providing illumination through the relay optics.