Flexible sensors and related systems for determining forces applied to an object, such as a surgical instrument, and methods for manufacturing same

Abstract

Methods of manufacturing a flexible force sensor include forming a first sensor part providing a plurality of spaced first electrode plates in an electrically non-conductive material. A second sensor part is also formed and includes a plurality of second electrode plates in an electrically non-conductive material. The second electrode plates are identical to the first electrode plates at least in terms of spacing. The first part is assembled to the second part such that each of the first electrode plates are aligned with and parallel to, yet spaced from, respective ones of the second electrode plates, establishing a plurality of capacitive sensing components. The first electrode plates are movable relative to the corresponding second electrode plates, establishing a variable gap therebetween. The sensor parts can be ring-shaped. The sensor parts can be formed via MEMS techniques, with the non-conductive material being a polymer.

What is claimed is: 
     
         1 . A method of manufacturing a flexible force sensor, the method comprising:
 forming a first sensor part including a plurality of first electrode plates in a non-conductive material, the first electrode plates being circumferentially spaced from one another;   forming a second sensor part including a plurality of second electrode plates in a non-conductive material, the second electrode plates being identical to the first electrode plates in at least shape and circumferential spacing; and   assembling the first sensor part to the second sensor part such that respective ones of the first electrode plates are aligned with and spaced from respective ones of the second electrode plates to establish a plurality of capacitive sensing components;   wherein the first electrode plate of each of the sensing components is movable relative to the corresponding second electrode plate to establish a variable gap therebetween.