US2016291269A1PendingUtilityA1
Photonic integrated circuit chip packaging
Est. expiryApr 1, 2035(~8.7 yrs left)· nominal 20-yr term from priority
H10W 90/00G02B 6/4238G02B 6/423G02B 6/136G02B 6/4274G02B 2006/12097G02B 6/4232G02B 6/4268G02B 6/131G02B 2006/12061G02B 6/4251G02B 2006/121H10F 71/00H10F 55/18H01L 25/167H01L 25/50
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Claims
Abstract
A localized hermetic sealing of a photonic integrated circuit component chip mounted in a photonic integrated circuit device chip to protect a chip-to-chip interface from contamination, thereby enhancing functionality and reliability. A covering lid mounted on or over the component chip is hermetically sealed to the device chip surrounding the component chip forming a localized hermetically sealed area.
Claims
exact text as granted — not AI-modifiedWe claim:
1 . A photonic integrated circuit (PIC) chip device comprising:
a component PIC chip including a component waveguide;
a device PIC chip for receiving the component PIC chip, and a device waveguide optically coupled with the component waveguide;
a covering lid, for covering the component PIC chip; and
a hermetic seal between the covering lid and the device PIC chip forming a localized hermetically sealed area around the component PIC chip.
2 . The device according to claim 1 , wherein the covering lid is integral with the PIC component chip.
3 . The device according to claim 2 , wherein the covering lid comprises a ledge extending from around an end of the component PIC chip.
4 . The device according to claim 3 , wherein the device PIC chip includes a pit; and wherein the component PIC chip is mounted in the pit; and wherein the hermetic seal is provided between the covering lid and an upper surface of the device PIC chip.
5 . The device according to claim 1 , wherein the covering lid is separate from the PIC component chip.
6 . The device according to claim 5 , wherein the covering lid includes a cavity for receiving an upper portion of the component PIC chip.
7 . The device according to claim 5 , further comprising a thermally-conductive heat spreader between the device PIC chip and the covering lid for dissipating heat from the device PIC chip.
8 . The device according to claim 1 , further comprising a first electrical connector on the component PIC chip, and a second electrical connector on the device PIC chip; wherein the first and second electrical connectors are connected within the localized hermetically sealed area.
9 . The device according to claim 8 , wherein the first electrical connector extends from one end of the component PIC chip; and wherein the second electrical connector extends from a bottom of a pit extending into the device PIC chip.
10 . The device according to claim 9 , further comprising an electrically conductive bonding material between the first and second electrical connectors bonding the component PIC chip in the pit.
11 . The device according to claim 1 , wherein the hermetic seal comprises a thermally conductive metal to dissipate heat from the component PIC chip to the device PIC chip.
12 . A method of assembling a photonic integrated circuit (PIC) device comprising:
mounting a component PIC chip onto a PIC device chip; aligning waveguides on the component PIC chip with waveguides on the device PIC chip; fixing the component PIC chip to the device PIC chip; and hermetically sealing a covering lid to an upper surface of the device PIC chip around the component PIC chip, thereby providing a localized hermitically sealed area around the component PIC chip.
13 . The method according to claim 12 , wherein the covering lid is integral with the component PIC chip.
14 . The method according to claim 13 , wherein the covering lid comprises a ledge extending from around an end of the component PIC chip.
15 . The method according to claim 14 , wherein the device PIC chip includes a pit for receiving the component PIC chip; and wherein the hermetically sealing step includes hermetically sealing the covering lid to an upper surface of the device PIC chip.
16 . The method according to claim 13 , wherein the component PIC chip includes a substrate in or on which the waveguide is formed; and
wherein the method further comprises removing a portion of the substrate to form the ledge.
17 . The method according to claim 12 , wherein the hermetically sealing step includes mounting a separate covering lid over the component PIC chip.
18 . The method according to claim 17 , wherein the covering lid includes a cavity for receiving an upper portion of the component PIC chip; and wherein a thermally conductive heat spreader is mounted in the cavity for dissipating heat from the component PIC chip.
19 . The method according to claim 12 , further comprising connecting electrical connectors on the component PIC chip to electrical connectors on the device PIC chip within the hermetically sealed area.
20 . The method according to claim 12 , wherein the hermetically sealing step is conducted under vacuum or any required inert gas atmosphere.Cited by (0)
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