US2016351443A1PendingUtilityA1

Inorganic ald film on an organic polymer surface

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Assignee: GEORGE STEVEN MPriority: Jul 18, 2001Filed: May 28, 2016Published: Dec 1, 2016
Est. expiryJul 18, 2021(expired)· nominal 20-yr term from priority
Inventors:Steven M. GeorgeJohn FergusonAlan W. WeimerChristopher Allen Wilson
H10P 14/6339H10W 20/055H10W 20/48C08J 7/0423B01J 2231/70B01J 21/063B01J 23/06C23C 16/0272C23C 16/14C23C 16/403B01J 23/70C23C 16/45555C09D 1/00B01J 2231/12B01J 23/38B01J 37/086B82Y 30/00C23C 16/4417B01J 31/069C23C 16/442B01J 21/04C01F 7/304B32B 27/36B32B 2255/205B32B 15/20C08F 112/08B32B 2307/558B32B 2439/00B32B 27/286C08F 120/10C23C 16/34B32B 27/302B32B 27/365C08G 73/10B32B 27/42B32B 9/045B32B 27/304B32B 2307/3065B32B 2255/10B32B 2307/714C23C 16/06B32B 27/288B32B 2307/71B32B 2307/7246C08G 64/00C08F 130/08C08F 110/06B32B 27/28B32B 27/285C08J 9/365B32B 2307/732B32B 27/32C08F 110/02B32B 27/34B32B 15/08C23C 16/45525B32B 2255/20B32B 2264/02B32B 27/281B32B 27/308B32B 27/38B32B 2307/7242C08J 2201/038H01L 21/0228H01L 23/5329H01L 21/76867C08J 7/048C08J 7/046C08J 7/043C08J 7/06B01J 35/39
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Claims

Abstract

The present invention relates to a method and a composition comprising a polymer substrate having free volume and/or a porous surface; and an inorganic film layer comprising a metal oxide or nitride at least partially covering the polymer substrate.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A composition comprising:
 a polymer substrate having free volume and/or a porous surface; and   an inorganic film layer comprising a metal oxide or nitride at least partially covering the polymer substrate.   
     
     
         2 . The composition of  claim 1 , wherein the inorganic film layer is conformal. 
     
     
         3 . The composition of  claim 1 , wherein the thickness of the inorganic film layer is about 200 nanometers or less. 
     
     
         4 . The composition of  claim 1 , wherein the thickness of the inorganic film layer is from about 0.1 nanometer to about 50 nanometers. 
     
     
         5 . The composition of  claim 1 , wherein the thickness of the inorganic film layer is from about 0.5 nanometer to about 35 nanometers. 
     
     
         6 . The composition of  claim 1 , wherein the thickness of the inorganic film layer is from about 1 nanometer to about 20 nanometers. 
     
     
         7 . The composition of  claim 1 , wherein the inorganic film layer comprises at least one of aluminum oxide, titanium oxide, zinc oxide, or a combination thereof. 
     
     
         8 . The composition of  claim 1 , wherein the polymer substrate comprises polyethylene or a derivative thereof. 
     
     
         9 . The composition of  claim 1 , wherein the polymer substrate comprises polypropylene or a derivative thereof. 
     
     
         10 . The composition of  claim 1 , wherein the polymer substrate comprises polymethyl methacrylate or a derivative thereof. 
     
     
         11 . The composition of  claim 1 , wherein the polymer substrate comprises polystyrene or a derivative thereof. 
     
     
         12 . The composition of  claim 1 , wherein the polymer substrate comprises polycarbonate or a derivative thereof. 
     
     
         13 . The composition of  claim 1 , wherein the polymer substrate comprises poly(1-trimethylsilyl propene) or a derivative thereof. 
     
     
         14 . The composition of  claim 1 , wherein the polymer substrate comprises at least one of ethylene homopolymers, propylene homopolymers, ethylene-butene copolymers, ethylene-hexene copolymers, and ethylene-methacrylate copolymers. 
     
     
         15 . The composition of  claim 1 , wherein the polymer substrate comprises at least one of polyvinylidene fluoride, polysulfones, polyether sulfones, polyesters, polyacetals, polyamides, polyimides, polyether ether ketones, polyphenylene oxides, polyphenylene sulfides, polyethylene naphthalates, and a mixture of inorganic particles with a binder polymer. 
     
     
         16 . The composition of  claim 1 , wherein the polymer substrate is poly(4,4′-oxydiphenylene-pyromellitimide). 
     
     
         17 . The composition of  claim 1 , wherein the polymer substrate is in the form of a particulate. 
     
     
         18 . The composition of  claim 1 , wherein the film layer comprising a metal oxide or nitride is deposited by atomic layer deposition. 
     
     
         19 . The composition of  claim 18 , wherein the atomic layer deposition is carried out in a fluidized bed reactor. 
     
     
         20 . The composition of  claim 18 , wherein the atomic layer deposition is carried out in a rotary bed rector or a vibrating bed reactor. 
     
     
         21 . The composition of  claim 1 , wherein the composition is fabricated into a container. 
     
     
         22 . The composition of  claim 21 , wherein the inorganic film layer provides a gas and vapor diffusion barrier for the container. 
     
     
         23 . The composition of  claim 1 , for use in space vehicles, wherein the inorganic film layer is positioned to deflect atoms, photons, and/or ions striking the composition.

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