Abrasive material having a structured surface

Abstract

To provide an abrasive material having a structured surface that is excellent in preventing adhesion and accumulation of foreign objects, and a manufacturing method thereof. The abrasive material of an embodiment of the present disclosure is an abrasive material having an abrasive layer with a structured surface with a plurality of three-dimensional elements arranged thereon, a surface treatment selected from the group consisting of fluoride treatment and silicon treatment being performed on at least a portion of the structured surface, and the fluoride treatment being selected from the group consisting of plasma treatment, chemical vapor deposition, physical vapor deposition, and fluorine gas treatment.

1 . An abrasive material comprising an abrasive layer having a structured surface with a plurality of three-dimensional elements arranged thereon, a surface treatment selected from the group consisting of fluoride treatment and silicon treatment being performed on at least a portion of the structured surface, and the fluoride treatment being selected from the group consisting of plasma treatment, chemical vapor deposition, physical vapor deposition, and fluorine gas treatment. 
     
     
         2 . The abrasive material according to  claim 1 , wherein the plurality of three-dimensional elements are periodically arranged on the structured surface. 
     
     
         3 . The abrasive material according to  claim 1 , wherein the silicon treatment is selected from the group consisting of plasma treatment, chemical vapor deposition, physical vapor deposition, and atom layer deposition. 
     
     
         4 . The abrasive material according to  claim 1 , wherein the abrasive layer includes a bulk layer comprising silicon carbide and a surface coating layer comprising diamond like carbon provided on at least a portion of the bulk layer. 
     
     
         5 . The abrasive material according to  claim 1 , wherein the abrasive layer comprises abrasive particles and a binder. 
     
     
         6 . The abrasive material according to  claim 1 , wherein the plurality of three-dimensional elements have a shape selected from the group consisting of round cylinders, oval cylinders, prisms, hemispheres, semi-ellipsoids, cones, pyramids, truncated cones, truncated pyramids, hipped roof shapes, and combinations thereof. 
     
     
         7 . A method of manufacturing an abrasive material, comprising:
 providing an abrasive material comprising an abrasive layer having a structured surface configured with a plurality of three-dimensional elements arranged thereon; and   performing a surface treatment selected from the group consisting of fluoride treatment and silicon treatment on at least a portion of the structured surface of the abrasive material;   the fluoride treatment being selected from the group consisting of plasma treatment, chemical vapor deposition, physical vapor deposition, and fluorine gas treatment.   
     
     
         8 . The method according to  claim 7 , wherein the silicon treatment is selected from the group consisting of plasma treatment, chemical vapor deposition, physical vapor deposition, and atom layer deposition. 
     
     
         9 . An abrasive material having an abrasive layer with a structured surface configured with a plurality of three-dimensional elements arranged thereon, at least a portion of the structured surface comprising: (a) a film comprising a material selected from the group consisting of densified fluorocarbon, silicon oxycarbide, and silicon oxide; (b) a fluorine terminated surface, or (c) a combination thereof.