Analyzing an object using a particle beam apparatus

Abstract

Described herein is a method for analyzing an object using a particle beam apparatus, for example an electron beam apparatus and/or an ion beam apparatus, or using an x-ray beam device and a particle beam apparatus or an x-ray beam device, by means of which the method is carried out. In the method, information about the object is loaded from a data memory into a control device. Furthermore, a group of detection units from the multiplicity of detection units is identified using the information loaded into the control device. A first detector segment is formed from the group of detection units using the control device. Interaction particles and/or interaction radiation, which is/are detected, is/are generated by guiding a particle beam onto the object and scanning the object using the particle beam, where a detector segment signal is read from the detector segment.

1 - 15 . (canceled) 
     
     
         16 . A method for analyzing an object using an x-ray beam device having at least one beam generator for generating x-rays, wherein interaction radiation is generated in the case of an interaction between the x-rays and the object, at least one detector for detecting the interaction radiation, wherein the detector has at least one detection surface, wherein a multiplicity of detection units are arranged at the detection surface, wherein each detection unit of the multiplicity of detection units is individually actuatable and readable by way of a control device, at least one data memory, in which information is stored, wherein the information includes information about an interaction behavior of the x-rays with the material of the object and/or information about solid angle regions, into which the interaction radiation is emitted after the generation thereof, and at least one analysis unit for analyzing the object, the method comprising:
 identifying at least one first group of detection units from the multiplicity of detection units using the information stored in the data memory;   forming a first detector segment from the first group of detection units;   loading information about the first detector segment into the control device;   guiding the x-rays onto the object;   detecting the interaction radiation with the detector, wherein a first detector segment signal is read from the first detector segment;   generating a representation of the object using the first detector segment signal; and   analyzing the object using the representation of the object in the analysis unit.   
     
     
         17 . A computer program product comprising program code, which can be loaded into a processor and which, when executed, controls an x-ray beam device having at least one beam generator for generating x-rays, wherein interaction radiation is generated in the case of an interaction between the x-rays and the object, at least one detector for detecting the interaction radiation, wherein the detector has at least one detection surface, wherein a multiplicity of detection units are arranged at the detection surface, wherein each detection unit of the multiplicity of detection units is individually actuatable and readable by way of a control device, at least one data memory, in which information is stored, wherein the information includes information about an interaction behavior of the x-rays with the material of the object and/or information about solid angle regions, into which the interaction radiation is emitted after the generation thereof, and at least one analysis unit for analyzing the object, the computer program code, when executed by a processor, performing the following steps:
 identifying at least one first group of detection units from the multiplicity of detection units using the information stored in the data memory;   forming a first detector segment from the first group of detection units;   loading information about the first detector segment into the control device;   guiding the x-rays onto the object;   detecting the interaction radiation with the detector, wherein a first detector segment signal is read from the first detector segment;   generating a representation of the object using the first detector segment signal; and   analyzing the object using the representation of the object in the analysis unit.   
     
     
         18 . An x-ray beam device for analyzing an object, comprising
 at least one beam generator for generating x-rays, wherein interaction radiation is generated in the case of an interaction between the x-rays and the object;   at least one detector for detecting the interaction radiation, wherein the detector has at least one detection surface, wherein a multiplicity of detection units are arranged at the detection surface, wherein each detection unit of the multiplicity of detection units is individually actuatable and readable by way of a control device;   at least one data memory configured to store information during operation, wherein the information comprises information about an interaction behavior of the x-rays with the material of the object and/or information about solid angle regions, into which the interaction radiation is emitted after the generation thereof,   at least one analysis unit for analyzing the object,   at least one processor, onto which a computer program product is loaded, the computer program code, when executed by a processor, performing the following steps:   identifying at least one first group of detection units from the multiplicity of detection units using the information stored in the data memory;   forming a first detector segment from the first group of detection units;   loading information about the first detector segment into the control device;   guiding the x-rays onto the object;   detecting the interaction radiation with the detector, wherein a first detector segment signal is read from the first detector segment;   generating a representation of the object using the first detector segment signal; and   analyzing the object using the representation of the object in the analysis unit.   
     
     
         19 . (canceled)