Packing for substrate plating jig and substrate plating jig using the same

Abstract

A packing for a plating jig attached to a plating jig for sealing conductive members for supplying power to a substrate and portions of the substrate surface in contact with the conductive members from a plating solution, including a packing main body formed from a long elastic member having ends and a connecting member which connects and fix connection ends of both end portions of the packing main body to each other for allowing the packing main body to be an endless shape. The connecting member includes a shaft portion and plural hooks provided to protrude at a prescribed angle from the shaft portion, and when both connection ends of the packing main body are linked, the connecting member is internally provided to extend inside the packing main body in both directions from a connecting point within a prescribed range over the connecting point where the connection ends are linked.

1 . A packing for a substrate plating jig attached to a plating jig for sealing conductive members for conducting electricity to a substrate and portions of the substrate surface in contact with the conductive members from a plating solution, comprising:
 a packing main body formed from a long elastic member having ends; and   a connecting member which links connection ends of both end portions of the packing main body to each other for allowing the packing main body to be an endless shape,   wherein the connecting member includes an shaft portion and plural hooks provided to protrude at a prescribed angle to both sides or one side of the shaft portion, and,   when both connection ends of the packing main body are linked, the connecting member is internally provided so as to extend inside the packing main body in both directions from the connection ends within a prescribed range over a connecting point where the connection ends are linked.   
     
     
         2 . The packing for the substrate plating jig according to  claim 1 ,
 wherein the hooks are formed to protrude from the shaft portion at an angle in a range of 30 degrees to 90 degrees.   
     
     
         3 . The packing for the substrate plating jig according to  claim 1 ,
 wherein the packing main body has a tube shape with a hollow portion.   
     
     
         4 . The packing for the substrate plating jig according to  claim 1 ,
 wherein the packing main body has a tube shape, the shaft portion of the connecting member is housed inside the hollow portion of the packing main body and tip end sides of the hooks bite or stick in an inner wall of the hollow portion to be locked.   
     
     
         5 . A substrate plating jig comprising:
 a substrate holder having a substrate housing portion on an upper surface;   a substrate pressing portion having an opening in which a surface to be plated of a substrate is exposed and sandwiching the substrate with the substrate holder to hold the substrate; and   a fixing means for fixing the substrate pressing portion to the substrate holder in a pressed state,   wherein the packing according to  claim 1  is provided to be inserted in a groove portion provided in a recessed manner on a back surface of the substrate pressing portion so that part thereof is exposed from the groove portion, and   the part of the packing exposed from the groove portion is pressed onto the substrate surface and the upper surface of the substrate holder by fixing the substrate pressing portion to a substrate support portion in the pressed state to thereby seal a peripheral edge portion of the substrate and a portion where conductive members are provided around the substrate housing portion from a plating solution.   
     
     
         6 . A substrate plating jig comprising:
 a substrate holder having a substrate housing portion on an upper surface;   a substrate pressing portion having an opening in which a surface to be plated of a substrate is exposed and sandwiching the substrate with the substrate holder to hold the substrate; and   a fixing means for fixing the substrate pressing portion to the substrate holder in a pressed state,   wherein the packing according to  claim 1  is inserted to be inserted in groove portions provided in a recessed manner respectively on a back surface of the substrate pressing portion and an upper surface of a substrate support portion so that part thereof is exposed from the groove portions, and   the part of the packing is pressed onto the substrate surface and the back surface of the substrate pressing portion by fixing the substrate pressing portion to the substrate support portion in the pressed state to thereby seal a peripheral edge portion of the substrate and a portion where conductive members are provided around the substrate housing portion from a plating solution.   
     
     
         7 . The substrate plating jig according to  claim 5 ,
 wherein the packings are provided in upper and lower two layers with respect to the groove portion of one place.   
     
     
         8 . The substrate plating jig according to  claim 7 ,
 wherein one of the packings provided in upper and lower layers is a tube-shaped packing having a hollow portion and the other is a string-shaped packing not having the hollow portion.   
     
     
         9 . The substrate plating jig according to  claim 6 ,
 wherein the packings are provided in upper and lower two layers with respect to the groove portion of one place.   
     
     
         10 . The substrate plating jig according to  claim 9 ,
 wherein one of the packings provided in upper and lower layers is a tube-shaped packing having a hollow portion and the other is a string-shaped packing not having the hollow portion.