US2017144152A1PendingUtilityA1
Processes for rapid microfabrication using thermoplastics and devices thereof
Est. expiryNov 13, 2027(~1.3 yrs left)· nominal 20-yr term from priority
Inventors:Michelle KhineChi-Shuo ChenAnthony GrimesDavid N. BreslauerLuke P. LeeMichael DunlapAjay GopinathanSayantani Ghosh
H10P 14/6332H10P 14/6334B81B 1/002B01F 13/0059G03F 7/0002B01L 2300/0867B81B 2203/0338B01L 2300/0887B81B 2201/051B01F 5/0647B01L 2200/12B01L 3/502707B81C 1/00071B01L 2300/0816B81C 2201/0152B01F 2215/0037B01F 33/30B82Y 40/00B81B 2201/058B01F 25/433B01F 25/4331B01F 2101/23B01F 25/10
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Claims
Abstract
A method is provided to prepare one or more microfluidic channels on a receptive material by applying an image-forming material to a heat sensitive thermoplastic receptive material in a designed pattern and heating the material under conditions that reduce the size of the thermoplastic receptive material by at least about 60%. In an alternative aspect, the microfluidic channels on receptive material are prepared by etching a designed pattern into a heat sensitive thermoplastic material support and then heating the material under conditions that reduce the size of the thermoplastic receptive material by at least about 60%.
Claims
exact text as granted — not AI-modified1 .- 57 . (canceled)
58 . A device comprising a heat-shrunk thermoplastic base having a textured metal surface, wherein the textured metal surface has an average height from about 100 nanometers to about 5 micrometers.
59 . The device of claim 58 , wherein the textured metal surface comprises at least one metal selected from the group consisting of silver, gold and copper.
60 . A method to prepare one or more microfluidic channels on a receptive material, comprising the steps of:
a) applying an image-forming material to a heat sensitive thermoplastic receptive material in a designed pattern; b) heating said material under conditions that reduce the size of the thermoplastic receptive material by at least about 60%; and c) preparing the microfluidic channels via lithography.
61 . The method according to claim 60 , wherein the image-forming material is a liquid containing one or more of the group of pigment, dye, or combination thereof.
62 . The method according to claim 60 , wherein the image-forming material is one or more of the group of an ink, a protein, a colloid, a dielectric material, a paste, or a combination thereof.
63 . The method according to claim 60 , wherein the image-forming material is a metal.
64 . The method according to claim 63 , wherein the metal is one or more of the group of silver, gold, copper, titanium, or a combination thereof.
65 . The method according to claim 60 , wherein the image-forming material is applied to the heat sensitive thermoplastic receptive material by one or more method comprising sputter coating, evaporation, chemical vapor deposition, pattern transfer, micro-contact printing or printing.
66 . The method according to claim 60 , wherein the heat sensitive thermoplastic receptive material is uni-axially biased to shrink along one axis or dimension.
67 . The method according to claim 60 , wherein the image-forming material heated under conditions to achieve a height of the image-forming material greater than about 25 micrometers.
68 . The method according to claim 60 , further comprising repeating step a) two or more times prior to performing step b).
69 . The method according to claim 68 , wherein the one or more microfluidic channels are of varying depths.
70 . The method according to claim 60 , wherein the height of the one or more microfluidic channels is from about 15 to about 120 micrometers.
71 . The method according to claim 60 , wherein the thermoplastic material is polystyrene.
72 . The method according to claim 60 , wherein the lithography of step c) refers to soft lithography or imprint lithography.
73 . A method to prepare a textured metal surface, comprising the steps of:
a) depositing a metal onto a heat sensitive thermoplastic receptive material; and b) reducing the material by at least about 60%; thereby preparing a textured metal surface.
74 . The method of claim 73 , wherein the heat sensitive thermoplastic material is uni-axially biased prior to performing steps a) and b).
75 . The method of claim 73 , wherein the metal is deposited by sputter coating, evaporation or chemical vapor deposition.
76 . The method of claim 73 , wherein the metal is deposited in a thickness from about 2 nanometers to about 100 nanometers.
77 . The method of claim 73 , wherein the metal comprises one or more of the group of silver, gold or copper.
78 . The method of claim 73 , wherein the material is reduced to achieve a surface texture in the range of from about 100 nanometers to about 5 micrometers.
79 . The method of claim 73 , wherein the thermoplastic material is polystyrene.
80 . The method of claim 73 , wherein the metal is deposited in a desired pattern.
81 . The method of claim 73 , wherein the heat sensitive thermoplastic material is reduced by heating.
82 . A method of propagating waves, comprising irradiating a device comprising a heat-shrunk thermoplastic base having a textured metal surface, wherein the textured metal surface has a height from about 50 nanometers to about 5 micrometers.
83 . The method of claim 82 , wherein the metal is at least one of silver, gold or copper.Cited by (0)
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