US2017158606A1PendingUtilityA1

Fluorine-containing compound, substrate for pattern formation, photodegradable coupling agent, pattern formation method, and compound

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Assignee: UNIV KANAGAWAPriority: Sep 4, 2012Filed: Feb 15, 2017Published: Jun 8, 2017
Est. expirySep 4, 2032(~6.1 yrs left)· nominal 20-yr term from priority
Inventors:Kazuo Yamaguchi
G03F 7/2002G03F 7/20C07C 205/56C07C 49/825G03F 7/0755H10P 76/2041G03F 7/16G03F 7/0046G03F 7/0002C07C 49/84C07C 205/45C07F 7/1804C07C 205/37
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Claims

Abstract

A compound represented by formula (e): where R 1 represents a branched chain or cyclic alkyl group having 3 to 10 carbon atoms, and R f1 and R f2 represent fluorinated alkoxy groups.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A compound represented by formula (e): 
       
         
           
           
               
               
           
         
         where R 1  represents a branched chain or cyclic alkyl group having 3 to 10 carbon atoms, and R f1  and R f2  represent fluorinated alkoxy groups. 
       
     
     
         2 . The compound according to  claim 1 ,
 wherein R l  represents an isopropyl group, an isobutyl group, or a tert-butyl group.   
     
     
         3 . The compound according to  claim 1 ,
 wherein R f1  or R f2  represent fluorinated alkoxy groups having 5 or more carbon atoms.   
     
     
         4 . The compound according to  claim 1 ,
 wherein R f1  or R f2  represent fluorinated alkoxy groups having 6 to 10 carbon atoms.

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