Electrochemical processing system

Abstract

The present invention relates to an electrochemical processing system. The electrochemical processing system comprises a belt electrode and a clean module. The clean module is corresponding to one side of the belt electrode. The electrochemical processing system may be used for cleaning the surface of the belt electrode during an electrochemical process.

What is claimed is: 
     
         1 . An electrochemical processing system, comprising:
 an electrochemical processing apparatus, comprising:
 an electrode transporting module; 
 a belt electrode, disposed at said electrode transporting module; and 
   a clean module, corresponding to one side of said belt electrode.   
     
     
         2 . The electrochemical processing system of  claim 1 , wherein said belt electrode is a ring belt electrode. 
     
     
         3 . The electrochemical processing system of  claim 1 , wherein said electrode transporting module includes:
 a rotating member, corresponding to and against the inner side of said belt electrode; and   a driver, connected with said rotating member for driving said rotating member to rotate.   
     
     
         4 . The electrochemical processing system of  claim 1 , wherein said clean module includes:
 a wheel brush, corresponding to one side of said belt electrode; and   a driver, connected with said wheel brush for driving said wheel brush to rotate.   
     
     
         5 . The electrochemical processing system of  claim 1 , further comprising a conductive member corresponding to and against the inner side of said belt electrode. 
     
     
         6 . The electrochemical processing system of  claim 1 , further comprising:
 a positioning module, corresponding to said belt electrode; and   an electrolyte channel, disposed at said positioning module.   
     
     
         7 . The electrochemical processing system of  claim 1 , further comprising:
 a mask disposing device, located in front of said electrochemical processing apparatus; and   a mask removing device, located behind said electrochemical processing apparatus.