Electrochemical polishing method

Abstract

An electrochemical polishing method is provided for polishing a workpiece having at least one sharp object. According to the present invention, the electrolyte is driven to flow to the sharp object and the electrochemical processing is performed for polishing the sharp object.

What is claimed is: 
     
         1 . An electrochemical polishing method, polishing workpiece having at least one sharp object, comprising:
 providing electrolyte flowing to said sharp object; and   performing electrochemical processes;   wherein said electrolyte flows from sharp end of said sharp object to sharp body of said sharp object for reducing the difference between first polished amount of said sharp end and second polished amount of said sharp body.   
     
     
         2 . The electrochemical polishing method of  claim 1 , further adjusting at least one processing parameter for adjusting the angle of said sharp object. 
     
     
         3 . The electrochemical polishing method of  claim 2 , wherein said processing parameter includes the flow rate of said electrolyte, the voltage intensity or current intensity of said electrochemical processing, or the processing time. 
     
     
         4 . The electrochemical polishing method of  claim 1 , further providing electrode having a plurality of hollow-out parts corresponding to said workpiece, and said electrolyte passing through said plurality of hollow-parts and flowing to said sharp object. 
     
     
         5 . The electrochemical polishing method of  claim 4 , further disposing flow equalizer between said electrode and said workpiece, said flow equalizer having at least one hollow-out part corresponding to said at least one sharp object of said workpiece, respectively, and said electrolyte further passing through said at least one hollow-out part of said flow equalizer and flowing to said sharp object. 
     
     
         6 . The electrochemical polishing method of  claim 5 , wherein said flow equalizer and said workpiece are spaced by a distance. 
     
     
         7 . The electrochemical polishing method of  claim 4 , further projecting said electrolyte to said electrode, and said electrolyte passing through said plurality of hollow-out parts of said electrode and flowing to said sharp object. 
     
     
         8 . The electrochemical polishing method of  claim 4 , further disturbing said electrolyte for driving said electrolyte to pass through said plurality of hollow-out parts of said electrode and flow to said sharp object. 
     
     
         9 . The electrochemical polishing method of  claim 4 , wherein said electrode and said workpiece are spaced by a distance. 
     
     
         10 . The electrochemical polishing method of method  4 , wherein said electrode is a metal mesh or a metal plate. 
     
     
         11 . The electrochemical polishing method of  claim 4 , wherein said plurality of hollow-out parts are arranged symmetrically. 
     
     
         12 . The electrochemical polishing method of  claim 4 , wherein said plurality of hollow-out parts are arranged asymmetrically. 
     
     
         13 . The electrochemical polishing method of  claim 4 , wherein the material of said electrode is titanium.