Metal organic frameworks for eletronic gas storage

Abstract

A metal organic framework (MOF) includes a coordination product of a metal ion and an at least bidentate organic ligand, where the metal ion and the organic ligand are selected to provide a deliverable adsorption capacity of at least 70 g/l for an electronic gas. A porous organic polymer (POP) includes polymerization product from at least a plurality of organic monomers, where the organic monomers are selected to provide a deliverable adsorption capacity of at least 70 g/l for an electronic gas.

What is claimed is: 
     
         1 . A metal organic framework (MOF) comprising the coordination product of a metal ion and an at least bidentate organic ligand, wherein the metal ion and the organic ligand are selected to provide a deliverable adsorption capacity of at least 70 g/L for an electronic gas, and wherein the electronic gas is selected from a group consisting of hydride gases, halide gases and organometallic Group V gaseous compounds. 
     
     
         2 . The MOF of  claim 1 , wherein the metal ion and the organic ligand are selected to provide the deliverable adsorption capacity of at least 190 g/l for an electronic gas measured at 650 torr and 25° C. 
     
     
         3 . The MOF  claim 2 , wherein the deliverable adsorption capacity is 190 to 840 g/l for the electronic gas. 
     
     
         4 . The MOF of  claim 1 , wherein:
 the electronic gas is selected from a group consisting of ammonia, arsine, boron trichloride, boron trifluoride, diborane, dichlorosilane, difluoromethane, disilane, fluorine, germane, germanium tetrafluoride, hexafluoroethane, hydrogen bromide, hydrogen chloride, hydrogen fluoride, methyl fluoride, methyl silane, nitrogen trifluoride, perfluoropropane, phosphine, silane, silicon tetrachloride, tetrafluoromethane, tetramethylsilane, silicon tetrafluoride, stibine, sulfur hexafluoride, trichlorosilane, trifluoromethane, trimethylsilane, tungsten hexafluoride and acetylene; and   the metal ion is selected from Li+, Na+, K+, Rb+, Be2+, Mg2+, Ca2+, Sr2+, Ba2+, Sc3+, Y3+, Ti4+, Zr4+, Hf4+, V5+, V4+, V3+, Nb3+, Ta3+, Cr3+, Cr2+, Mo3+, W3+, Mn3+, Fe3+, Fe2+, Ru3+, Ru2+, Os3+, Os2+, Co3+, Co2+, Ni2+, Ni+, Pd2+, Pd+, Pt2+, Pt+, Cu2+, Cu+, Ag+, Au+, Zn2+, Al3+, Ga3+, In3+, Si4+, Si2+, Ge4+, Ge2+, Sn4+, Sn2+, Bi5+, Bi3+, Cd2+, Mn2+, Tb3+, Gd3+, Ce3+, La3+ and Cr4+, and combinations thereof.   
     
     
         5 . The MOF of  claim 4 , wherein the electronic gas is selected from a group consisting of arsine, phosphine, diborane and boron trifluoride. 
     
     
         6 . The MOF of  claim 5 , wherein the MOF has a fill density for the arsine measured at 25° C. and 650 torr that is greater than 172 g/L and less than 850 g/L. 
     
     
         7 . The MOF of  claim 5 , wherein the MOF has a fill density for the boron trifluoride measured at 25° C. and 650 torr that is greater than 150 g/L and less than 600 g/L. 
     
     
         8 . The MOF of  claim 5 , wherein the MOF has a fill density for the phosphine measured at 25° C. and 650 torr that is greater than 70 g/L and less than 400 g/L. 
     
     
         9 . The MOF of  claim 1 , wherein the MOF is formed into pellets, disks or a monolithic body. 
     
     
         10 . The MOF of  claim 1 , wherein the MOF is in powder form. 
     
     
         11 . The MOF of  claim 1 , wherein the MOF comprises a pore size distribution between 3Å and 32 Å. 
     
     
         12 . The MOF of  claim 11 , wherein the MOF comprises a gravimetric surface area between 1,000 and 14,500 m 2 /g and a pore volume between 0.3 and 3 cm 2 /g. 
     
     
         13 . A gas storage and dispensing apparatus comprising a tank filled with the MOF of  claim 1 . 
     
     
         14 . The apparatus of  claim 13 , further comprising the electronic gas adsorbed on the MOF. 
     
     
         15 . A metal organic framework (MOF) comprising the coordination product of a metal ion and an at least bidentate organic ligand, wherein the metal ion and the organic ligand are selected to provide a deliverable adsorption capacity of at least 70 g/L for an electronic gas, and wherein the MOF is formed into pellets, disks or a monolithic body. 
     
     
         16 . The MOF  claim 15 , wherein the deliverable adsorption capacity is 190 to 840 g/l for the electronic gas measured at 650 torr and 25° C. 
     
     
         17 . The MOF of  claim 15 , wherein:
 the electronic gas is selected from a group consisting of ammonia, arsine, boron trichloride, boron trifluoride, diborane, dichlorosilane, difluoromethane, disilane, fluorine, germane, germanium tetrafluoride, hexafluoroethane, hydrogen bromide, hydrogen chloride, hydrogen fluoride, hydrogen selenide, hydrogen telluride, hydrogen sulfide, methyl fluoride, methyl silane, nitrogen trifluoride, perfluoropropane, phosphine, silane, silicon tetrachloride, tetrafluoromethane, tetramethylsilane, silicon tetrafluoride, stibine, sulfur hexafluoride, trichlorosilane, trifluoromethane, trimethylsilane, tungsten hexafluoride and acetylene; and   the metal ion is selected from Li+, Na+, K+, Rb+, Be2+, Mg2+, Ca2+, Sr2+, Ba2+, Sc3+, Y3+, Ti4+, Zr4+, Hf4+, V5+, V4+, V3+, Nb3+, Ta3+, Cr3+, Cr2+, Mo3+, W3+, Mn3+, Fe3+, Fe2+, Ru3+, Ru2+, Os3+, Os2+, Co3+, Co2+, Ni2+, Ni+, Pd2+, Pd+, Pt2+, Pt+, Cu2+, Cu+, Ag+, Au+, Zn2+, Al3+, Ga3+, In3+, Si4+, Si2+, Ge4+, Ge2+, Sn4+, Sn2+, Bi5+, Bi3+, Cd2+, Mn2+, Tb3+, Gd3+, Ce3+, La3+ and Cr4+, and combinations thereof.   
     
     
         18 . The MOF of  claim 17 , wherein the electronic gas is selected from a group consisting of arsine, phosphine, diborane and boron trifluoride. 
     
     
         19 . The MOF of  claim 18 , wherein the MOF comprises a pore size distribution between 3 Å and 32 Å, a gravimetric surface area between 1,000 and 14,500 m 2 /g and a pore volume between 0.3 and 3 cm 2 /g. 
     
     
         20 . A gas storage and dispensing apparatus comprising a tank filled with the MOF of  claim 15 . 
     
     
         21 . A metal organic framework (MOF) comprising the coordination product of a metal ion and an at least bidentate organic ligand, wherein:
 the metal ion and the organic ligand are selected to provide a deliverable adsorption capacity of at least 70 g/L for an electronic gas; and   the MOF comprises a pore size distribution between 3 Å and 32 Å, a gravimetric surface area between 1,000 and 14,500 m 2 /g and a pore volume between 0.3 and 3 cm 2 /g.   
     
     
         22 . The MOF  claim 21 , wherein the deliverable adsorption capacity is 190 to 840 g/l for the electronic gas measured at 650 torr and 25° C. 
     
     
         23 . The MOF of  claim 21 , wherein:
 the electronic gas is selected from a group consisting of ammonia, arsine, boron trichloride, boron trifluoride, diborane, dichlorosilane, difluoromethane, disilane, fluorine, germane, germanium tetrafluoride, hexafluoroethane, hydrogen bromide, hydrogen chloride, hydrogen fluoride, hydrogen selenide, hydrogen telluride, hydrogen sulfide, methyl fluoride, methyl silane, nitrogen trifluoride, perfluoropropane, phosphine, silane, silicon tetrachloride, tetrafluoromethane, tetramethylsilane, silicon tetrafluoride, stibine, sulfur hexafluoride, trichlorosilane, trifluoromethane, trimethylsilane, tungsten hexafluoride and acetylene; and   the metal ion is selected from Li+, Na+, K+, Rb+, Be2+, Mg2+, Ca2+, Sr2+, Ba2+, Sc3+, Y3+, Ti4+, Zr4+, Hf4+, VS+, V4+, V3+, Nb3+, Ta3+, Cr3+, Cr2+, Mo3+, W3+, Mn3+, Fe3+, Fe2+, Ru3+, Ru2+, Os3+, Os2+, Co3+, Co2+, Ni2+, Ni+, Pd2+, Pd+, Pt2+, Pt+, Cu2+, Cu+, Ag+, Au+, Zn2+, Al3+, Ga3+, In3+, Si4+, Si2+, Ge4+, Ge2+, Sn4+, Sn2+, Bi5+, Bi3+, Cd2+, Mn2+, Tb3+, Gd3+, Ce3+, La3+ and Cr4+, and combinations thereof.   
     
     
         24 . The MOF of  claim 23 , wherein the electronic gas is selected from a group consisting of arsine, phosphine, diborane and boron trifluoride. 
     
     
         25 . The MOF of  claim 21 , wherein the MOF is formed into pellets, disks or a monolithic body. 
     
     
         26 . The MOF of  claim 21 , wherein the MOF is in powder form. 
     
     
         27 . A gas storage and dispensing apparatus comprising a tank filled with the MOF of  claim 21 .