Treatment apparatus for treating a surface of a body

Abstract

The invention relates to a treatment apparatus ( 1 ) for treating a surface ( 21 ) of a body ( 2 ) with a first treatment medium ( 31 ) and a second treatment medium ( 32 ). In this respect, the treatment apparatus ( 1 ) includes a holding device ( 5 ) rotatable about an axis of rotation ( 4 ) for receiving and holding the body ( 2 ) and a rotary drive ( 6 ) rotationally fixedly coupled to the rotatable holding device ( 5 ) as well as a supply device ( 7 ) for supplying the first treatment medium ( 31 ) and the second treatment medium ( 32 ) to the surface ( 21 ) of the body ( 2 ) held in the holding device ( 5 ). The treatment apparatus includes a collection container ( 8 ) having a separation element ( 80 ) which separation element ( 80 ) divides the collection container ( 8 ) into a first chamber ( 81 ) and into a second chamber ( 82 ) such that the first treatment medium ( 31 ) can be collected in the first chamber ( 81 ) and the second treatment medium ( 32 ) can be collected separately in the second chamber ( 82 ). In accordance with the invention, the collection container ( 8 ) includes a base chamber part ( 800 ) not movable with respect to the holding device ( 5 ) and the separation element ( 80 ) is movably arranged between a first position (A) and a second position (B) such that the first treatment medium ( 31 ) can be led off into the first chamber ( 81 ) in the first position (A) and the second treatment medium ( 32 ) can be led off into the second chamber ( 82 ) in the second position (B).

What is claimed is: 
     
         1 . A treatment apparatus for treating a surface of a body, comprising:
 a first treatment medium and a second treatment medium,   wherein the treatment apparatus includes a holding device rotatable about an axis of rotation for receiving and holding the body, a rotary drive rotationally fixedly coupled to the rotatable holding device, and a supply device for supplying the first treatment medium and the second treatment medium to the surface of the body held in the holding device,   wherein the treatment apparatus further includes a collection container having a separation element, in which the separation element divides the collection container into a first chamber and a second chamber such that the first treatment medium can be collected in the first chamber and the second treatment medium can be separately collected in the second chamber,   wherein the collection container includes a base chamber part not displaceable with respect to the holding device, and the separation element is movably arranged between a first position (A) and a second position (B), such that the first treatment medium can be led off into the first chamber in the first position (A), and the second treatment fluid can be led off into the second chamber in the second position (B).   
     
     
         2 . The treatment apparatus according to  claim 1 , wherein the non-displaceable base chamber part includes a chamber bottom through which the first treatment medium and the second treatment medium can be led off from the collection container. 
     
     
         3 . The treatment apparatus according to  claim 1 , wherein the separation element is movable by means of a connecting rod between the first position (A) and a second position (B). 
     
     
         4 . The treatment apparatus according to  claim 1 , wherein the separation element is movable by means of a spindle between the first position (A) and a second position (B). 
     
     
         5 . The treatment apparatus according to  claim 1 , wherein the separation element is movable by means of a stretchable bellows between the first position (A) and a second position (B). 
     
     
         6 . The treatment apparatus according to  claim 1 , wherein the separation element is formed in a presettable region of a flexible wall. 
     
     
         7 . The treatment apparatus according to  claim 1 , wherein the rotatable holding device is provided in a process chamber. 
     
     
         8 . The treatment apparatus according to  claim 1 , wherein the rotary drive is provided within the process chamber. 
     
     
         9 . The treatment apparatus according to  claim 1 , wherein the rotary drive is a bearingless motor including a stator and a rotor magnetically journalled in a bearingless manner with respect to the stator, wherein the bearingless motor is designed preferably having the stator and the rotor within the process chamber 
     
     
         10 . The treatment apparatus according to  claim 9 , wherein the rotor forms the holding device. 
     
     
         11 . The treatment apparatus according to  claim 9 , wherein the rotor is made as a ring. 
     
     
         12 . The treatment apparatus according to  claim 9 , wherein the rotor is permanently magnetic. 
     
     
         13 . The treatment apparatus according to  claim 9 , wherein the stator is provided outside the process chamber. 
     
     
         14 . The treatment apparatus according to  claim 1 , wherein the body is a disk, in particular a wafer, for manufacturing microelectronic components. 
     
     
         15 . The treatment apparatus according to  claim 1 , wherein a manipulator (M), in particular a program-controlled rotor unit, is provided for the automatic changing of the body.