US2017309710A1PendingUtilityA1

Integrated graphite-based structure

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Assignee: SOLAN LLCPriority: Jan 15, 2013Filed: Mar 21, 2017Published: Oct 26, 2017
Est. expiryJan 15, 2033(~6.5 yrs left)· nominal 20-yr term from priority
Inventors:Mark Alan Davis
H10P 95/00H10P 14/6902H10P 14/6516H10P 14/6334H10P 14/6329H10P 14/6328H10P 14/6326H10P 14/3451H10P 14/3406H10P 14/2901H10P 14/432H10P 14/274H10P 14/265H10P 14/65H10P 14/63H10P 14/44H10P 14/43H10P 14/27H10P 14/24H10P 14/22H10P 14/00C01B 32/186C23C 16/04C23C 14/0605C01B 32/21C01B 32/16C23C 16/26C01B 32/00C01B 32/188C01B 32/18C01B 32/184C23C 14/34C01B 2204/04H01L 29/1606H01L 21/02115H10D 64/205H10D 62/8303H10D 62/882H10D 48/01
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Claims

Abstract

A structure is provided that comprises a substrate, a plurality of elements, and a plurality of trenches disposed on the substrate. Each element is separated from adjacent elements by a trench in the plurality of trenches and has a top surface with a first and an opposing second side. A first portion of the top surface is on the first side and a second portion of the top surface is on the opposing second side. The structure further comprises a plurality of first graphene layers, each of which is formed on the first portion of the top surface of an element in the plurality of elements. The structure further comprises a plurality of second graphene layers, each of which is formed on the second portion of the top surface of a corresponding element so that each element is separately overlayed by a first graphene layer and a second graphene layer.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . An integrated graphite-based structure, comprising:
 a substrate;   a plurality of elements and a plurality of trenches disposed on the substrate, each respective element in the plurality of elements (i) separated from an adjacent element by a corresponding trench in the plurality of trenches and (ii) having a top surface with a first side and an opposing second side, wherein a first portion of the top surface is on the first side and a second portion of the top surface is on the opposing second side;   
       a plurality of first graphene layers, each respective first graphene layer in the plurality of first graphene layers formed on the first portion of the top surface of a corresponding element in the plurality of elements; and
 a plurality of second graphene layers, each respective second graphene layer formed on the second portion of the top surface of a corresponding element in the plurality of elements so that each respective element in the plurality of elements is separately overlayed by a first graphene layer in the plurality of first graphene layers and a second graphene layer in the plurality of second graphene layers. 
 
     
     
         2 . The integrated graphite-based structure of  claim 1 , wherein
 a first graphene layer in the plurality of first graphene layers on the first portion of the top surface of a first element in the plurality of elements has a width that is between 10 nm and 300 nm; and   a second graphene layer in the plurality of second graphene layers on the second portion of the top surface of the first element has a width that is between 10 nm and 300 nm.   
     
     
         3 . The integrated graphite-based structure of  claim 1 , wherein
 a first graphene layer in the plurality of first graphene layers on the first portion of the top surface of a first element in the plurality of elements has a width that is between 3 nm and 10 nm; and   a second graphene layer in the plurality of second graphene layers on the second portion of the top surface of the first element has a width that is between 3 nm and 10 nm.   
     
     
         4 . The integrated graphite-based structure of  claim 1 , wherein
 a first graphene layer in the plurality of first graphene layers on the first portion of the top surface of a first element in the plurality of elements has a width that is less than 5 nm; and   a second graphene layer in the plurality of second graphene layers on the second portion of the top surface of the first element has a width that is less than 5 nm.   
     
     
         5 . The integrated graphite-based structure of  claim 1 , wherein the graphite-based structure includes one or more diodes, one or more transistors, one or more LEDs, one or more photovoltaic cells, one or more photodetectors, or a combination thereof. 
     
     
         6 . The integrated graphite-based structure of  claim 1 , wherein
 each respective first graphene layer in the plurality of first graphene layers comprises between 3 and 500 graphene sheets, and   each respective second graphene layer in the plurality of second graphene layers comprises between 3 and 500 graphene sheets.   
     
     
         7 . The integrated graphite-based structure of  claim 1 , wherein the substrate and the plurality of elements comprise a dielectric material. 
     
     
         8 . The integrated graphite-based structure of  claim 1 , wherein
 a first graphene layer in the plurality of first graphene layers is on the first portion of the top surface of a first element in the plurality of elements;   a second graphene layer in the plurality of second graphene layers is on the second portion of the top surface of the first element; and   the first graphene layer and the second graphene layer are separated by a meniscus.   
     
     
         9 . The integrated graphite-based structure of  claim 1 , wherein
 a first graphene layer in the plurality of first graphene layers is on the first portion of the top surface of a first element in the plurality of elements;   a second graphene layer in the plurality of second graphene layers is on the second portion of the top surface of the first element; and   the first graphene layer and the second graphene layer are electrically isolated from each other.   
     
     
         10 . The integrated graphite-based structure of  claim 1 , wherein
 a first graphene layer in the plurality of first graphene layers is on the first portion of the top surface of a first element in the plurality of elements;   a second graphene layer in the plurality of second graphene layers is on the second portion of the top surface of the first element; and   the first graphene layer and the second graphene layer are joined together to form a closed form shape.   
     
     
         11 . The integrated graphite-based structure of  claim 10 , wherein the closed form shape is a circle, oval, or n-gon, wherein n is an integer of 3 or greater. 
     
     
         12 . The integrated graphite-based structure of  claim 10 , wherein the first graphene layer and the second graphene layer collectively define a meniscus. 
     
     
         13 . The integrated graphite-based structure of  claim 1 , wherein each element in the plurality of elements is a rib, a mesa, or a pillar. 
     
     
         14 . The integrated graphite-based structure of  claim 1 , wherein each element in the plurality of elements is a rib having a width that is between 1 nm and 10 nm. 
     
     
         15 . The integrated graphite-based structure of  claim 1 , wherein each element in the plurality of elements is a rib having a width that is between 10 nm and 40 nm. 
     
     
         16 . The integrated graphite-based structure of  claim 1 , wherein each element in the plurality of elements is a rib having a width that is between 50 nm and 500 nm. 
     
     
         17 . The integrated graphite-based structure of  claim 1 , wherein each element in the plurality of elements is a mesa having a largest dimension that is between 10 nm and 100 nm. 
     
     
         18 . The integrated graphite-based structure of  claim 1 , wherein each element in the plurality of elements is a mesa having a largest dimension that is between 100 nm and 1 μm. 
     
     
         19 . The integrated graphite-based structure of  claim 1 , wherein each element in the plurality of elements is a mesa having a largest dimension that is between 1 μm and 10 μm. 
     
     
         20 . The integrated graphite-based structure of  claim 1 , wherein the top surface of each respective element in the plurality of elements further comprises a third portion and a forth portion, wherein the third portion does not overlap with the first portion, second portion or fourth portion, and where the forth portion does not overlap the first portion or the second portion, and wherein the integrated graphite-based structure further comprises:
 a plurality of third graphene layers, each respective third graphene layer in the plurality of third graphene layers formed on the third portion of the top surface of a corresponding element in the plurality of elements; and   a plurality of fourth graphene layers, each respective fourth graphene layer formed on the fourth portion of the top surface of a corresponding element in the plurality of elements so that each respective element in the plurality of elements is separately overlayed by a first graphene layer in the plurality of first graphene layers, a second graphene layer in the plurality of second graphene layers, a third graphene layer in the plurality of third graphene layers, and a fourth graphene layer in the plurality of fourth graphene layers.

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