Sample Stage

Abstract

Sample stage, e.g. for use in a scanning electron microscope. The sample stage includes a base, a sample carrier, and an actuator assembly arranged for moving the sample carrier in at least one direction substantially parallel to the base. The actuator assembly is arranged so as not to contribute to the mechanical stiffness of the sample stage from the sample carrier to the base.

1 - 35 . (canceled) 
     
     
         36 . A sample stage including a base, a sample carrier, and an actuator assembly arranged for moving the sample carrier in at least one direction substantially parallel to the base. 
     
     
         37 . The sample stage of  claim 36 , wherein the actuator assembly does not contribute to the mechanical stiffness of the sample stage from the sample carrier to the base. 
     
     
         38 . The sample stage of  claim 36 , including a two-dimensional slide bearing arranged for allowing the sample carrier to slide in two different directions in a plane parallel to the base. 
     
     
         39 . The sample stage of  claim 36 , wherein the actuator assembly is connected to the sample carrier through a connection that is flexible in a direction orthogonal to the base. 
     
     
         40 . The sample stage of  claim 39 , wherein the sample carrier is positioned against the base. 
     
     
         41 . The sample stage of  claim 40 , wherein the sample carrier is slidingly positioned against the base. 
     
     
         42 . The sample stage of  claim 41 , wherein the sample carrier includes at least one sliding surface. 
     
     
         43 . The sample stage of  claim 36 , wherein the actuator assembly is further arranged for rotating the sample carrier about an axis that is orthogonal to the base, and wherein the slide bearing is further arranged for allowing the sample carrier to rotate about the axis orthogonal to the base. 
     
     
         44 . The sample stage of  claim 36 , wherein the connection of the actuator assembly to the sample carrier is substantially rigid in the direction for moving the sample carrier. 
     
     
         45 . The sample stage of  claim 36 , wherein the actuator assembly is positioned beside the sample carrier. 
     
     
         46 . The sample stage of  claim 36 , wherein the sample carrier includes a sample holder for holding a sample. 
     
     
         47 . The sample stage of  claim 36 , wherein the sample carrier is positioned within a vacuum chamber having a loading door, and wherein the sample carrier includes a sealing element positioned such that the sample carrier can be sealingly pressed against a wall of the vacuum chamber so as to allow access to the sample carrier via the loading door. 
     
     
         48 . The sample stage of  claim 36 , wherein the sample carrier includes a bottom and a circumferential wall enclosing a cavity for holding a sample, and a sealing member, wherein the sealing member is positioned on the circumferential wall. 
     
     
         49 . The sample stage of  claim 36  wherein the sample stage is positioned within a vacuum chamber having a loading door, the sample carrier being movable in a positioning direction substantially parallel to the base, the sample carrier further being movable towards the loading door in a loading direction, different from the positioning direction. 
     
     
         50 . The sample stage of  claim 49 , wherein the loading direction is orthogonal to, or has a component orthogonal to, the base. 
     
     
         51 . A vacuum system including a vacuum chamber having a loading door and a sample stage according to  claim 36 , wherein the sample carrier is positioned within the vacuum chamber. 
     
     
         52 . The vacuum system of  claim 51 , wherein the actuator assembly is positioned inside the vacuum chamber. 
     
     
         53 . The vacuum system of  claim 53 , wherein the vacuum chamber includes a pushing device for sealingly pressing the sample carrier against the wall of the vacuum chamber. 
     
     
         54 . The vacuum system of  claim 53 , wherein the pushing device includes bellows. 
     
     
         55 . The vacuum system of  claim 53 , wherein the pushing device is operated by vacuum and/or ambient air pressure. 
     
     
         56 . A scanning electron microscope including a vacuum system according to  claim 51 . 
     
     
         57 . The scanning electron microscope of  claim 56 , designed as a desktop scanning electron microscope. 
     
     
         58 . The scanning electron microscope of  claim 56 , further including an electron optical column connected to the vacuum chamber, wherein the base is or is connected to a wall of the vacuum chamber opposite the electron optical column. 
     
     
         59 . The scanning electron microscope of  claim 56 , further including an electron optical column connected to the vacuum chamber, wherein the base is or is connected to a wall of the vacuum chamber to which the electron optical column is connected. 
     
     
         60 . A method for positioning a sample carrier including the steps of:
 providing a base;   positioning a sample carrier positioned on the base; and   moving the sample carrier in a direction substantially parallel to the base using an actuator connected to the sample carrier through a connection that is flexible in a direction orthogonal to the base and/or using a two-dimensional slide bearing arranged for allowing the sample carrier to slide in two different directions in a plane parallel to the base.