Powder for film formation and material for film formation

Abstract

The present invention relates a coating powder comprising a rare earth oxyfluoride (Ln-O—F) and having: an average particle size (D 50 ) of 0.1 to 10 μm, a pore volume of pores having a diameter of 10 μm or smaller of 0.1 to 0.5 cm 3 /g as measured by mercury intrusion porosimetry, and a ratio of the maximum peak intensity (S0) assigned to a rare earth oxide (Ln x O y ) in the 2θ angle range of from 20° to 40° to the maximum peak intensity (S1) assigned to the rare earth oxyfluoride (Ln-O—F) in the same range, S0/S1, of 1.0 or smaller in powder X-ray diffractometry using Cu-Kα rays or Cu-Kα 1 rays.

1 . A coating powder comprising a rare earth oxyfluoride (Ln-O—F) and having:
 an average particle size (D 50 ) of 0.1 to 10 μm, 
 a pore volume of pores having a diameter of 10 μm or smaller of 0.1 to 0.5 cm 3 /g as measured by mercury intrusion porosimetry, and 
 a ratio of the maximum peak intensity (S0) assigned to a rare earth oxide (Ln x O y ) in the 2θ angle range of from 20° to 40° to the maximum peak intensity (S1) assigned to the rare earth oxyfluoride (Ln-O—F) in the same range, S0/S1, of 1.0 or smaller in powder X-ray diffractometry using Cu-Kα rays or Cu-Kα 1  rays. 
 
     
     
         2 . The coating powder according to  claim 1 , having an average particle size (D 50 ) of 0.2 to 5 μm, a dispersion index of 0.7 or smaller, and an aspect ratio of 1.0 to 3.0. 
     
     
         3 . The coating powder according to  claim 1 , having a fluorine concentration of 30% by mass or lower. 
     
     
         4 . The coating powder according to  claim 1 , showing a pore size peak in the range of from 0.1 μm to 5 μm in the pore size distribution of pores having a diameter of 10 μm or smaller measured by mercury intrusion porosimetry with pore size as abscissa and log differential pore volume as ordinate. 
     
     
         5 . The coating powder according to  claim 1 , comprising a rare earth fluoride (LnF 3 ) in addition to the rare earth oxyfluoride (Ln-O—F). 
     
     
         6 . The coating powder according to  claim 1 , having a dispersion index of 0.7 or smaller. 
     
     
         7 . The coating powder according to  claim 1 , having a ratio of the maximum peak intensity (S0) assigned to a rare earth oxide (Ln x O y ) in the 2θ angle range of from 20° to 40° to the maximum peak intensity (S1) assigned to the rare earth oxyfluoride (Ln-O—F) in the same range, S0/S1, of 0.10 or smaller in powder X-ray diffractometry using Cu-Kα rays or Cu-Kα 1  rays. 
     
     
         8 . The coating powder according to  claim 1 , having a ratio of the number of moles of oxygen (O) per kg of the powder to the number of moles of the rare earth (Ln) per kg of the powder, O/Ln by mole, of 0.03 to 1.1. 
     
     
         9 . The coating powder according to  claim 1 , wherein the rare earth is at least one element selected from yttrium (Y), cerium (Ce), samarium (Sm), gadolinium (Gd), dysprosium (Dy), erbium (Er), and ytterbium (Yb). 
     
     
         10 . The coating powder according to  claim 9 , wherein the rare earth is yttrium (Y). 
     
     
         11 . The coating powder according to  claim 1 , being used to form a coating by physical vapor deposition, aerosol deposition, or thermal spraying. 
     
     
         12 . The coating powder according to  claim 11 , wherein the physical vapor deposition is vacuum evaporation or ion plating. 
     
     
         13 . A coating material comprising the coating powder according to  claim 1 . 
     
     
         14 . The coating material according to  claim 13 , being in the form of slurry. 
     
     
         15 . The coating material according to  claim 14 , being used to form a coating by thermal spraying. 
     
     
         16 . A coating material comprising a sintered compact of the coating powder according to  claim 1 . 
     
     
         17 . The coating material according to  claim 16 , being used to form a coating by physical vapor deposition. 
     
     
         18 . The coating material according to  claim 17 , wherein the physical vapor deposition is vacuum evaporation, ion plating, or sputtering. 
     
     
         19 . A method comprising using a powder comprising a rare earth oxyfluoride (Ln-O—F) as a raw material for forming a coating,
 the powder having: 
 an average particle size (D 50 ) of 0.1 to 10 μm, 
 a pore volume of pores having a diameter of 10 μm or smaller of 0.1 to 0.5 cm 3 /g as measured by mercury intrusion porosimetry, and 
 a ratio of the maximum peak intensity (S0) assigned to a rare earth oxide (Ln x O y ) in the 2θ angle range of from 20° to 40° to the maximum peak intensity (S1) assigned to the rare earth oxyfluoride (Ln-O—F) in the same range, S0/S1, of 1.0 or smaller in powder X-ray diffractometry using Cu-Kα rays or Cu-Kα 1  rays. 
 
     
     
         20 . A method for forming a coating, comprising using a powder comprising a rare earth oxyfluoride (Ln-O—F),
 the powder having: 
 an average particle size (D 50 ) of 0.1 to 10 μm, 
 a pore volume of pores having a diameter of 10 μm or smaller of 0.1 to 0.5 cm 3 /g as measured by mercury intrusion porosimetry, and 
 a ratio of the maximum peak intensity (S0) assigned to a rare earth oxide (Ln x O y ) in the 2θ angle range of from 20° to 40° to the maximum peak intensity (S1) assigned to the rare earth oxyfluoride (Ln-O—F) in the same range, S0/S1, of 1.0 or smaller in powder X-ray diffractometry using Cu-Kα rays or Cu-Kα 1  rays.