Manufacturing method of semiconductor device

Abstract

A semiconductor wafer serving as a treatment target has a stack structure in which a high-dielectric-constant gate insulating film is formed on a silicon base material with an interface layer film of silicon dioxide sandwiched therebetween, and a metal gate electrode containing fluorine is further formed thereon. A heat treatment apparatus radiates flash light from a flash lamp to the semiconductor wafer in an atmosphere containing hydrogen to carry out heating treatment for an extremely short period of time of 100 milliseconds or less. As a result, diffusion of nitrogen contained in the metal gate electrode is inhibited, at the same time, only the fluorine is diffused from the high-dielectric-constant gate insulating film to an interface between the interface layer film and the silicon base material to reduce an interface state, and reliability of the gate stack structure can be improved.

What is claimed is: 
     
         1 . A manufacturing method of a semiconductor device of forming a high-dielectric-constant gate insulating film on a silicon substrate with an interface layer film sandwiched therebetween, the manufacturing method comprising following steps of:
 (a) forming the high-dielectric-constant gate insulating film on a surface of said substrate with the interface layer film of silicon dioxide sandwiched therebetween;   (b) forming a film containing fluorine on said high-dielectric-constant gate insulating film; and   (c) subjecting said substrate to heating treatment of 100 milliseconds or less to diffuse the fluorine to said high-dielectric-constant gate insulating film and said interface layer film.   
     
     
         2 . The manufacturing method of the semiconductor device according to  claim 1 . wherein
 the film formed in said step (b) is a metal gate electrode.   
     
     
         3 . The manufacturing method of the semiconductor device according to  claim 2 , wherein
 said metal gate electrode contains TiN, TaN, or AlN.   
     
     
         4 . The manufacturing method of the semiconductor device according to  claim 2 , wherein
 a content of the fluorine contained in said metal gate electrode is 0.1 at % or more to 10 at % or less.   
     
     
         5 . The manufacturing method of the semiconductor device according to  claim 1 , wherein,
 in said step (c), flash light is radiated from a flash lamp to the surface of said substrate.   
     
     
         6 . The manufacturing method of the semiconductor device according to  claim 1 , wherein,
 in said step (c), the heating treatment of said substrate is carried out in a gas atmosphere of one selected from a group consisting of hydrogen, ammonia, nitrogen trifluoride, and fluorine.