US2018030614A1PendingUtilityA1

Feed system for crystal growing systems

29
Assignee: SUNEDISON SEMICONDUCTOR LTDPriority: Feb 12, 2015Filed: Feb 12, 2015Published: Feb 1, 2018
Est. expiryFeb 12, 2035(~8.6 yrs left)· nominal 20-yr term from priority
C30B 29/06C30B 15/00C30B 35/00
29
PatentIndex Score
0
Cited by
0
References
0
Claims

Abstract

A system for growing a crystal ingot from a melt includes a housing and a feed system. The housing defines a growth chamber and an ingot removal chamber positioned above the growth chamber. The feed system includes an enclosure, a feed material reservoir positioned within the enclosure, and a feed channel including an intake end and an outlet end. The intake end is configured to receive feed material from the feed material reservoir. The housing has an opening in communication with the removal chamber and a connector proximate the opening, and the enclosure has an opening and a connector configured to mate with the housing connector. The feed channel is moveable between a retracted position and an extended position in which the feed channel extends through the opening in the housing and the outlet end is positioned within the removal chamber.

Claims

exact text as granted — not AI-modified
1 . A system for growing a crystal ingot from a melt, the system comprising:
 a housing defining a growth chamber and an ingot removal chamber positioned above the growth chamber; and   a feed system including:
 an enclosure; 
 a feed material reservoir positioned within the enclosure; and 
 a feed channel including an intake end and an outlet end, the intake end configured to receive feed material from the feed material reservoir; 
   wherein the housing has an opening in communication with the removal chamber and a connector proximate the opening, and the enclosure has an opening and a connector configured to mate with the housing connector, the feed channel moveable between a retracted position and an extended position in which the feed channel extends through the opening in the housing and the outlet end is positioned within the removal chamber.   
     
     
         2 . The system of  claim 1  further comprising a carriage moveable between multiple crystal growing systems, wherein the feed system is mounted on the carriage such that the feed system is transportable to multiple crystal growing systems. 
     
     
         3 . The system of  claim 1  further comprising a heat shield positioned within the growth chamber, the heat shield defining an annular opening sized and shaped to receive a crystal ingot therethrough, wherein the feed system is configured to feed chunk feedstock material through the annular opening of the heat shield. 
     
     
         4 . The system of  claim 1 , wherein the housing includes an upper dome defining an opening providing communication between the growth chamber and the removal chamber, wherein the feed system is configured to feed chunk feedstock material through the opening in the upper dome. 
     
     
         5 . The system of  claim 1 , wherein the feed system is configured to feed chunk feedstock material having a maximum feature size greater than about 30 mm. 
     
     
         6 . The system of  claim 6 , wherein the feed system is configured to feed chunk feedstock material having a maximum feature size of at least about 45 mm. 
     
     
         7 . The system of  claim 1 , wherein the opening in the housing has a diameter of at least about 150 mm. 
     
     
         8 . The system of  claim 7 , wherein the opening in the housing has a diameter of at least about 200 mm. 
     
     
         9 . The system of  claim 1 , wherein the feed channel has a width of at least about 10 cm. 
     
     
         10 . The system of  claim 9 , wherein the feed channel has a width of at least about 15 cm. 
     
     
         11 . The system of  claim 1 , wherein the feed channel is mounted on a linear slide mechanism, the feed channel configured to slide along the linear slide mechanism between the retracted position and the extended position. 
     
     
         12 . The system of  claim 1 , wherein the enclosure connector is operably connected to the enclosure by an expansion joint, the expansion joint configured to expand and retract to enable the enclosure connector to move relative to the enclosure. 
     
     
         13 . A feed system for use with a crystal growing system including a housing defining a growth chamber and a removal chamber positioned above the growth chamber, the feed system comprising:
 an enclosure defining an interior volume and an opening providing communication with the interior volume, the enclosure including a connector proximate the opening and configured to connect the enclosure to the housing;   a feed material reservoir positioned within the interior volume of the enclosure; and   a feed channel including an intake end and an outlet end, the intake end configured to receive feed material from the feed material reservoir, the feed channel moveable between a retracted position and an extended position in which the feed channel extends through the opening in the enclosure and into the removal chamber of the crystal growing system.   
     
     
         14 . The system of  claim 13  further comprising a moveable carriage, the enclosure mounted on the carriage such that the feed system is transportable to multiple crystal growing systems. 
     
     
         15 - 20 . (canceled) 
     
     
         21 . The system of  claim 13 , wherein the feed channel is mounted on a linear slide mechanism, the feed channel configured to slide along the linear slide mechanism between the retracted position and the extended position. 
     
     
         22 . The system of  claim 13 , wherein the enclosure connector is operably connected to the enclosure by an expansion joint, the expansion joint configured to expand and retract to enable the enclosure connector to move relative to the enclosure. 
     
     
         23 . A method of retrofitting a crystal growing system with a feed system including a feed channel moveable between a retracted position and an extended position, the crystal growing system including a housing defining a growth chamber and an ingot removal chamber positioned above the growth chamber, the method comprising:
 forming a feed port in the housing, the feed port providing communication with the removal chamber of the crystal growing system; and   connecting the feed system to the housing such that, when the feed channel is in the extended position, the feed channel extends through the feed port and into the removal chamber.   
     
     
         24 . The method of  claim 23 , wherein forming a feed port includes forming a feed port having a diameter of at least about 150 mm. 
     
     
         25 . The method of  claim 24 , wherein forming a feed port includes forming a feed port having a diameter of at least about 200 mm. 
     
     
         26 . The method of  claim 23  further comprising connecting a vacuum flange to the housing proximate the feed port, wherein connecting the feed system to the housing includes connecting the vacuum flange to a connector of the feed system.

Cited by (0)

No later patents cite this yet.

References (0)

No backward citations on record.