US2018068755A1PendingUtilityA1

Method for manufacturing transparent conductor, transparent conductor and device for manufacturing the same, and device for manufacturing transparent conductor precursor

Assignee: TOSHIBA KKPriority: Mar 14, 2014Filed: Nov 14, 2017Published: Mar 8, 2018
Est. expiryMar 14, 2034(~7.6 yrs left)· nominal 20-yr term from priority
G06F 3/041C23F 1/00H01L 31/022466C23F 1/18H01L 31/028H01L 29/413H01B 1/02H01L 51/0021H01B 1/04Y02E10/549Y02P70/521H01L 51/5234H01B 1/22B82Y 40/00C23F 1/08H01B 1/20G06F 2203/04103H01L 51/003H01L 51/5215B82Y 10/00H01B 1/24H01L 29/1606Y10T428/24331B82Y 30/00H01L 51/442H10K 50/828H10K 50/816H10D 64/205H10D 62/882H10F 77/244H10F 77/122H10K 71/60H10K 30/82H10K 71/80Y02E10/547Y02P70/50
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Claims

Abstract

According to one embodiment, a method of manufacturing a transparent conductor is provided. In the method, a silver nanowire layer including a plurality of silver nanowires and having openings is formed on a graphene film supported by a copper support. Then, a transparent resin layer insoluble in a copper-etching solution is formed on the silver nanowire layer such that the transparent resin layer contacts the graphene film through the openings. The copper support is then brought into contact with the non-acidic copper-etching solution to remove the copper support, thereby exposing the graphene film.

Claims

exact text as granted — not AI-modified
1 .- 8 . (canceled) 
     
     
         9 . A transparent conductor comprising:
 a graphene film;   a silver nanowire layer on the graphene film, the silver nanowire layer comprising a plurality of silver nanowires and having an opening; and   a transparent resin layer on the silver nanowire layer, the transparent resin layer being in contact with the graphene film through the opening of the silver nanowire layer,   wherein a peak height of G band in a Raman spectrum of the graphene film is larger than that of D band.   
     
     
         10 . The transparent conductor according to  claim 9 , wherein the graphene film protrudes into the transparent resin layer at a portion that is in contact with the transparent resin layer, the graphene film having a recess having a depth equal to or less than half a diameter of the silver nanowire. 
     
     
         11 . The transparent conductor according to  claim 9 , wherein a copper content in the graphene film measured by XPS is 1 atomic % or less. 
     
     
         12 . The transparent conductor according to  claim 9 , wherein the graphene film comprises graphene in which a part of carbon atoms are substituted with nitrogen atoms. 
     
     
         13 .- 14 . (canceled)

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